[1] Bogaerts W, Pérez D, Capmany J et al. Programmable photonic circuits[J]. Nature, 586, 207-216(2020).

[2] Shen Y C, Harris N C, Skirlo S et al. Deep learning with coherent nanophotonic circuits[J]. Nature Photonics, 11, 441-446(2017).

[3] Bai B W, Yang Q P, Shu H W et al. Microcomb-based integrated photonic processing unit[J]. Nature Communications, 14, 66(2023).

[4] Xu X Y, Tan M X, Corcoran B et al. 11 TOPS photonic convolutional accelerator for optical neural networks[J]. Nature, 589, 44-51(2021).

[5] Zhu S, Zhang Y W, Feng J X et al. Integrated lithium niobate photonic millimetre-wave radar[J]. Nature Photonics, 19, 204-211(2025).

[6] Chen R X, Shu H W, Shen B T et al. Breaking the temporal and frequency congestion of LiDAR by parallel chaos[J]. Nature Photonics, 17, 306-314(2023).

[7] Feng H K, Ge T, Guo X Q et al. Integrated lithium niobate microwave photonic processing engine[J]. Nature, 627, 80-87(2024).

[8] Shu H W, Chang L, Tao Y S et al. Microcomb-driven silicon photonic systems[J]. Nature, 605, 457-463(2022).

[9] Xu M Y, He M B, Zhang H G et al. High-performance coherent optical modulators based on thin-film lithium niobate platform[J]. Nature Communications, 11, 3911(2020).

[10] Du Y Q, Li B H, Hua X et al. Chip-integrated quantum signature network over 200 km[J]. Light: Science & Applications, 14, 108(2025).

[11] Smit M, Williams K, van der Tol J. Past, present, and future of InP-based photonic integration[J]. APL Photonics, 4, 050901(2019).

[12] Shekhar S, Bogaerts W, Chrostowski L et al. Roadmapping the next generation of silicon photonics[J]. Nature Communications, 15, 751(2024).

[13] Leuthold J, Koos C, Freude W. Nonlinear silicon photonics[J]. Nature Photonics, 4, 535-544(2010).

[14] Chan D W U, Wu X, Zhang Z Y et al. C-band 67 GHz silicon photonic microring modulator for dispersion-uncompensated 100 Gbaud PAM-4[J]. Optics Letters, 47, 2935-2938(2022).

[15] Poulton C V, Byrd M J, Russo P et al. Coherent LiDAR with an 8, 192-element optical phased array and driving laser[J]. IEEE Journal of Selected Topics in Quantum Electronics, 28, 6100508(2022).

[16] Corcoran B, Mitchell A, Morandotti R et al. Optical microcombs for ultrahigh-bandwidth communications[J]. Nature Photonics, 19, 451-462(2025).

[17] Hu Y W, Zhu D, Lu S Y et al. Integrated electro-optics on thin-film lithium niobate[J]. Nature Reviews Physics, 7, 237-254(2025).

[18] Wang C, Zhang M, Chen X et al. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages[J]. Nature, 562, 101-104(2018).

[19] Yu M J, Barton Ⅲ D, Cheng R et al. Integrated femtosecond pulse generator on thin-film lithium niobate[J]. Nature, 612, 252-258(2022).

[20] Yu M J, Cheng R, Reimer C et al. Integrated electro-optic isolator on thin-film lithium niobate[J]. Nature Photonics, 17, 666-671(2023).

[21] Kaur P, Boes A, Ren G H et al. Hybrid and heterogeneous photonic integration[J]. APL Photonics, 6, 061102(2021).

[22] Xiang C, Jin W, Terra O et al. 3D integration enables ultralow-noise isolator-free lasers in silicon photonics[J]. Nature, 620, 78-85(2023).

[23] Li Z Y, Chen Y, Zhang J M et al. Hybrid silicon nitride/lithium niobate electro-optical modulator with wide optical bandwidth and high RF bandwidth based on ion-cut wafer-level bonding technology[C], Th1E.1(2025).

[24] Soref R A, Lorenzo J P. Single-crystal silicon: a new material for 1.3 and 1.6 μm integrated-optical components[J]. Electronics Letters, 21, 953-954(1985).

[25] Jiao X M, Song L J, Wen C F et al. Polarization-insensitive thermo-optic Mach-Zehnder switches on silicon[J]. Optics Letters, 49, 7090-7093(2024).

[26] Tao Z H, Shen B T, Li W C et al. Versatile photonic molecule switch in multimode microresonators[J]. Light: Science & Applications, 13, 51(2024).

[27] Wang Y M, Shu H W, Han X Y. High-precision silicon-based integrated optical temperature sensor[J]. Chinese Optics, 14, 1355-1361(2021).

[28] Su Y K, Zhang Y, Qiu C Y et al. Silicon photonic platform for passive waveguide devices: materials, fabrication, and applications[J]. Advanced Materials Technologies, 5, 1901153(2020).

[29] Assefa S, Xia F N, Vlasov Y A. Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects[J]. Nature, 464, 80-84(2010).

[30] Sohn B U, Monmeyran C, Kimerling L C et al. Kerr nonlinearity and multi-photon absorption in germanium at mid-infrared wavelengths[J]. Applied Physics Letters, 111, 091902(2017).

[31] Skandalos I, Bucio T D, Mastronardi L et al. A 100 Gb s-1 quantum-confined Stark effect modulator monolithically integrated with silicon nitride on Si[J]. Communications Engineering, 4, 82(2025).

[32] Wang Y, Jiao Y Q, Williams K. Scaling photonic integrated circuits with InP technology: a perspective[J]. APL Photonics, 9, 050902(2024).

[33] Ogiso Y, Ozaki J, Sugiura K et al. High speed InP modulator for beyond 200 Gbaud[C], Tu2D.7-28(2024).

[34] Li N, Han K, Spratt W et al. Ultra-low-power sub-photon-voltage high-efficiency light-emitting diodes[J]. Nature Photonics, 13, 588-592(2019).

[35] Chen S M, Li W, Wu J et al. Electrically pumped continuous-wave Ⅲ–Ⅴ quantum dot lasers on silicon[J]. Nature Photonics, 10, 307-311(2016).

[36] Joyce H J, Parkinson P, Jiang N et al. Electron mobilities approaching bulk limits in “surface-free” GaAs nanowires[J]. Nano Letters, 14, 5989-5994(2014).

[37] Zheng H M, Yu K P, Li S C et al. Ultralow-loss silicon nitride integrated photonics: nonlinear optics and applications (invited)[J]. Acta Optica Sinica, 44, 1513018(2024).

[38] Fan Z B, Chen Z M, Zhou X et al. Recent advances in silicon nitride-based photonic devices and applications[J]. Chinese Optics, 14, 998-1018(2021).

[39] Fan Z B, Shao Z K, Xie M Y et al. Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging[J]. Physical Review Applied, 10, 014005(2018).

[40] Ji X C, Okawachi Y, Gil-Molina A et al. Ultra-low-loss silicon nitride photonics based on deposited films compatible with foundries[J]. Laser & Photonics Reviews, 17, 2200544(2023).

[41] Frigg A, Boes A, Ren G H et al. Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films[J]. Optics Express, 27, 37795-37805(2019).

[42] Tan D T H, Ooi K J A, Ng D K T. Nonlinear optics on silicon-rich nitride: a high nonlinear figure of merit CMOS platform[J]. Photonics Research, 6, B50-B66(2018).

[43] Buzaverov K A, Baburin A S, Sergeev E V et al. Silicon nitride integrated photonics from visible to mid-infrared spectra[J]. Laser & Photonics Reviews, 18, 2400508(2024).

[44] Xiang C, Jin W, Bowers J E. Silicon nitride passive and active photonic integrated circuits: trends and prospects[J]. Photonics Research, 10, A82-A96(2022).

[45] Zhu D, Shao L B, Yu M J et al. Integrated photonics on thin-film lithium niobate[J]. Advances in Optics and Photonics, 13, 242-352(2021).

[46] Han H P, Ruan S C, Xiang B X. Heterogeneously integrated photonics based on thin film lithium niobate platform[J]. Laser & Photonics Reviews, 19, 2400649(2025).

[47] Lin J T, Yao N, Hao Z Z et al. Broadband quasi-phase-matched harmonic generation in an on-chip monocrystalline lithium niobate microdisk resonator[J]. Physical Review Letters, 122, 173903(2019).

[48] Wang C, Langrock C, Marandi A et al. Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides[J]. Optica, 5, 1438-1441(2018).

[49] Liu H X, Pan B C, Li H et al. First demonstration of lithium niobate photonic chip for dense wavelength-division multiplexing transmitters[J]. Advanced Photonics, 6, 066001(2024).

[50] Wang C, Zhang M, Yu M J et al. Monolithic lithium niobate photonic circuits for Kerr frequency comb generation and modulation[J]. Nature Communications, 10, 978(2019).

[51] Poberaj G, Koechlin M, Sulser F et al. Ion-sliced lithium niobate thin films for active photonic devices[J]. Optical Materials, 31, 1054-1058(2009).

[52] Rabiei P, Gunter P. Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding[J]. Applied Physics Letters, 85, 4603(2004).

[53] Tian Y H, Yuan M R, Qin S J et al. Thin film lithium niobate on-chip integration of multi-dimensional multiplexed photonic devices (invited)[J]. Laser & Optoelectronics Progress, 61, 1116004(2024).

[54] Zhang H J, Pang B N, Zheng D H et al. Fabrication of dammann grating devices using femtosecond laser direct writing assisted by plasma etching[J]. Chinese Journal of Lasers, 51, 1801006(2024).

[55] You J, Luo Y K, Yang J et al. Hybrid/integrated silicon photonics based on 2D materials in optical communication nanosystems[J]. Laser & Photonics Reviews, 14, 2000239(2020).

[56] Ma Q J, Ren G H, Mitchell A et al. Recent advances on hybrid integration of 2D materials on integrated optics platforms[J]. Nanophotonics, 9, 2191-2214(2020).

[57] Geim A K, Novoselov K S. The rise of graphene[J]. Nature Materials, 6, 183-191(2007).

[58] Degl’Innocenti R, Kindness S J, Beere H E et al. All-integrated terahertz modulators[J]. Nanophotonics, 7, 127-144(2018).

[59] Geim A K. Graphene: status and prospects[J]. Science, 324, 1530-1534(2009).

[60] Tian H, Chin M L, Najmaei S et al. Optoelectronic devices based on two-dimensional transition metal dichalcogenides[J]. Nano Research, 9, 1543-1560(2016).

[61] Zhou K G, Zhang H L. Lighten the Olympia of the flatland: probing and manipulating the photonic properties of 2D transition-metal dichalcogenides[J]. Small, 11, 3206-3220(2015).

[62] Autere A, Jussila H, Dai Y Y et al. Nonlinear optics with 2D layered materials[J]. Advanced Materials, 30, e1705963(2018).

[63] Yu S L, Wu X Q, Wang Y P et al. 2D materials for optical modulation: challenges and opportunities[J]. Advanced Materials, 29, 1606128(2017).

[64] Shi J H, Li Z J, Sang D K et al. THz photonics in two dimensional materials and metamaterials: properties, devices and prospects[J]. Journal of Materials Chemistry C, 6, 1291-1306(2018).

[65] Yamashita S. Nonlinear optics in carbon nanotube, graphene, and related 2D materials[J]. APL Photonics, 4, 034301(2019).

[66] Youngblood N, Li M. Integration of 2D materials on a silicon photonics platform for optoelectronics applications[J]. Nanophotonics, 6, 1205-1218(2017).

[67] Kim S, Fröch J E, Christian J et al. Photonic crystal cavities from hexagonal boron nitride[J]. Nature Communications, 9, 2623(2018).

[68] Wang J M, Wang L, Liu J. Overview of phase-change materials based photonic devices[J]. IEEE Access, 8, 121211-121245(2020).

[69] Zhang Y F, Ríos C, Shalaginov M Y et al. Myths and truths about optical phase change materials: a perspective[J]. Applied Physics Letters, 118, 210501(2021).

[70] Hong S H, Zhang L, Wu J C et al. Multimode-enabled silicon photonic delay lines: break the delay-density limit[J]. Light: Science & Applications, 14, 145(2025).

[71] Liu X Y, Ying P, Zhong X M et al. Highly efficient thermo-optic tunable micro-ring resonator based on an LNOI platform[J]. Optics Letters, 45, 6318-6321(2020).

[72] Hon N K, Soref R, Jalali B. The third-order nonlinear optical coefficients of Si, Ge, and Si1-xGex in the midwave and longwave infrared[J]. Journal of Applied Physics, 110, 011301(2011).

[73] Guo R X, Chen W C, Gao H R et al. Is Ge an excellent material for mid-IR Kerr frequency combs around 3-μm wavelengths?[J]. Journal of Lightwave Technology, 40, 2097-2103(2022).

[74] Della Corte F G, Cocorullo G, Iodice M et al. Temperature dependence of the thermo-optic coefficient of InP, GaAs, and SiC from room temperature to 600 K at the wavelength of 1.5 μm[J]. Applied Physics Letters, 77, 1614-1616(2000).

[75] Stievater T H, Mahon R, Park D et al. Mid-infrared difference-frequency generation in suspended GaAs waveguides[J]. Optics Letters, 39, 945-948(2014).

[76] Dinu M, Quochi F, Garcia H. Third-order nonlinearities in silicon at telecom wavelengths[J]. Applied Physics Letters, 82, 2954-2956(2003).

[77] Sun D H, Zhang Y W, Wang D Z et al. Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications[J]. Light: Science & Applications, 9, 197(2020).

[78] Chang L, Xie W Q, Shu H W et al. Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators[J]. Nature Communications, 11, 1331(2020).

[79] Ikeda K, Saperstein R E, Alic N et al. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides[J]. Optics Express, 16, 12987-12994(2008).

[80] Zhang H, Virally S, Bao Q L et al. Z-scan measurement of the nonlinear refractive index of graphene[J]. Optics Letters, 37, 1856-1858(2012).

[81] Tanaka S, Jeong S H, Sekiguchi S et al. High-output-power, single-wavelength silicon hybrid laser using precise flip-chip bonding technology[J]. Optics Express, 20, 28057-28069(2012).

[82] Lu H H, Lee J S, Zhao Y et al. Flip-chip integration of tilted VCSELs onto a silicon photonic integrated circuit[J]. Optics Express, 24, 16258-16266(2016).

[83] Billah M R, Blaicher M, Hoose T et al. Hybrid integration of silicon photonics circuits and InP lasers by photonic wire bonding[J]. Optica, 5, 876-883(2018).

[84] Knechtel R. Glass Frit Wafer Bonding[M]. Handbook of wafer bonding, 1-17(2012).

[85] Smith J A, Jevtics D, Guilhabert B et al. Hybrid integration of chipscale photonic devices using accurate transfer printing methods[J]. Applied Physics Reviews, 9, 041317(2022).

[86] Menard E, Lee K J, Khang D Y et al. A printable form of silicon for high performance thin film transistors on plastic substrates[J]. Applied Physics Letters, 84, 5398-5400(2004).

[87] Hur S H, Khang D Y, Kocabas C et al. Nanotransfer printing by use of noncovalent surface forces: applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers[J]. Applied Physics Letters, 85, 5730-5732(2004).

[88] Kim S, Wu J, Carlson A et al. Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing[J]. Proceedings of the National Academy of Sciences of the United States of America, 107, 17095-17100(2010).

[89] Han X, Yuan M R, Xiao H F et al. Integrated photonics on the dielectrically loaded lithium niobate on insulator platform[J]. Journal of the Optical Society of America B, 40, D26-D37(2023).

[90] Wang Y W, Chen Z H, Cai L T et al. Amorphous silicon-lithium niobate thin film strip-loaded waveguides[J]. Optical Materials Express, 7, 4018-4028(2017).

[91] Chen L, Xu Q, Wood M G et al. Hybrid silicon and lithium niobate electro-optical ring modulator[J]. Optica, 1, 112-118(2014).

[92] Zhang P, Huang H J, Jiang Y H et al. High-speed electro-optic modulator based on silicon nitride loaded lithium niobate on an insulator platform[J]. Optics Letters, 46, 5986-5989(2021).

[93] Churaev M, Wang R N, Riedhauser A et al. A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform[J]. Nature Communications, 14, 3499(2023).

[94] Webster M A, Pafchek R M, Mitchell A et al. Width dependence of inherent TM-mode lateral leakage loss in silicon-on-insulator ridge waveguides[J]. IEEE Photonics Technology Letters, 19, 429-431(2007).

[95] Yu Z J, Xi X, Ma J W et al. Photonic integrated circuits with bound states in the continuum[J]. Optica, 6, 1342-1348(2019).

[96] Wang X X, Weigel P O, Zhao J et al. Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate[J]. APL Photonics, 4, 096101(2019).

[97] Zou J H, Yu Y, Ye M Y et al. Ultra efficient silicon nitride grating coupler with bottom grating reflector[J]. Optics Express, 23, 26305-26312(2015).

[98] Korček R, Cheben P, Fraser W et al. Low-loss grating coupler based on inter-layer mode interference in a hybrid silicon nitride platform[J]. Optics Letters, 48, 4017-4020(2023).

[99] Yu Z G, Yin Y X, Huang X R et al. Silicon nitride assisted tri-layer edge coupler on lithium niobate-on-insulator platform[J]. Optics Letters, 48, 3367-3370(2023).

[100] Yu Y, Yu Z J, Zhang Z Y et al. Wavelength-division multiplexing on an etchless lithium niobate integrated platform[J]. ACS Photonics, 9, 3253-3259(2022).

[101] Chen L, Han X, Zhou X D et al. Demonstration of a high-performance 3 dB power splitter in silicon nitride loaded lithium niobate on insulator[J]. Laser & Photonics Reviews, 17, 2300377(2023).

[102] Han X, Jiang Y H, Xiao H F et al. Subwavelength grating-assisted contra-directional couplers in lithium niobate on insulator[J]. Laser & Photonics Reviews, 17, 2300203(2023).

[103] Han X, Jiang Y H, Frigg A et al. Mode and polarization-division multiplexing based on silicon nitride loaded lithium niobate on insulator platform[J]. Laser & Photonics Reviews, 16, 2100529(2022).

[104] Han X, Chen L, Jiang Y H et al. Integrated subwavelength gratings on a lithium niobate on insulator platform for mode and polarization manipulation[J]. Laser & Photonics Reviews, 16, 2200130(2022).

[105] Liao H T, Chen L, Zhou X D et al. Photonic metamaterial-inspired polarization manipulating devices on etchless thin film lithium niobate platform[J]. Laser & Photonics Reviews, 18, 2400381(2024).

[106] Chen Y H, Yang C A, Wang T F et al. Research progress on mid-infrared antimonide semiconductor lasers and heterogeneous integration technology (invited)[J]. Chinese Journal of Lasers, 52, 0501012(2025).

[107] Li M X, Chang L, Wu L E et al. Integrated pockels laser[J]. Nature Communications, 13, 5344(2022).

[108] Marinins A, Hänsch S, Sar H et al. Wafer-scale hybrid integration of InP DFB lasers on Si photonics by flip-chip bonding with sub-300 nm alignment precision[J]. IEEE Journal of Selected Topics in Quantum Electronics, 29, 8200311(2023).

[109] Zhou J X, Huang T, Fang Z W et al. Laser diode-pumped compact hybrid lithium niobate microring laser[J]. Optics Letters, 47, 5599-5601(2022).

[110] Franken C A A, Cheng R, Powell K et al. High-power and narrow-linewidth laser on thin-film lithium niobate enabled by photonic wire bonding[J]. APL Photonics, 10, 026107(2025).

[111] Xiang C, Jin W, Guo J et al. Narrow-linewidth Ⅲ-Ⅴ/Si/Si3N4 laser using multilayer heterogeneous integration[J]. Optica, 7, 20-21(2020).

[112] Xiang C, Liu J Q, Guo J et al. Laser soliton microcombs heterogeneously integrated on silicon[J]. Science, 373, 99-103(2021).

[113] Wan Y T, Xiang C, Guo J et al. High speed evanescent quantum-dot lasers on Si[J]. Laser & Photonics Reviews, 15, 2100057(2021).

[114] Liang D, Srinivasan S, Descos A et al. High-performance quantum-dot distributed feedback laser on silicon for high-speed modulations[J]. Optica, 8, 591-593(2021).

[115] Justice J, Bower C, Meitl M et al. Wafer-scale integration of group Ⅲ-Ⅴ lasers on silicon using transfer printing of epitaxial layers[J]. Nature Photonics, 6, 610-614(2012).

[116] Zhang J, Haq B, O’Callaghan J et al. Transfer-printing-based integration of a Ⅲ-Ⅴ-on-silicon distributed feedback laser[J]. Optics Express, 26, 8821-8830(2018).

[117] Haq B, Rahimi Vaskasi J, Zhang J et al. Micro-transfer-printed Ⅲ-Ⅴ-on-silicon C-band distributed feedback lasers[J]. Optics Express, 28, 32793-32801(2020).

[118] Shams-Ansari A, Renaud D, Cheng R et al. Electrically pumped laser transmitter integrated on thin-film lithium niobate[J]. Optica, 9, 408-411(2022).

[119] Ghosh S, O’Callaghan J, Moynihan O et al. Scalable transfer printing approach to heterogeneous integration of InP lasers on silicon-on-insulator waveguide platform[J]. Applied Physics Letters, 125, 081104(2024).

[120] Wan Y T, Norman J C, Tong Y Y et al. 1.3 µm quantum dot-distributed feedback lasers directly grown on (001) Si[J]. Laser & Photonics Reviews, 14, 2000037(2020).

[121] Yan Z, Han Y, Lin L Y et al. A monolithic InP/SOI platform for integrated photonics[J]. Light: Science & Applications, 10, 200(2021).

[122] Wei W Q, He A, Yang B et al. Monolithic integration of embedded Ⅲ-Ⅴ lasers on SOI[J]. Light: Science & Applications, 12, 84(2023).

[123] Hu X, Wu D Y, Chen D G et al. 280 Gbit/s PAM-4 Ge/Si electro-absorption modulator with 3-dB bandwidth beyond 110 GHz[C], 1-3(2023).

[124] Jin M, Tao Y S, Gao X et al. Linearity of a silicon-based graphene electro-absorption modulator[J]. Optics Letters, 47, 3075-3078(2022).

[125] Agarwal H, Terrés B, Orsini L et al. 2D-3D integration of hexagonal boron nitride and a high-κ dielectric for ultrafast graphene-based electro-absorption modulators[J]. Nature Communications, 12, 1070(2021).

[126] He M B, Xu M Y, Ren Y X et al. High-performance hybrid silicon and lithium niobate Mach-Zehnder modulators for 100 Gbit s-1 and beyond[J]. Nature Photonics, 13, 359-364(2019).

[127] Valdez F, Mere V, Wang X X et al. 110 GHz, 110 mW hybrid silicon-lithium niobate Mach-Zehnder modulator[J]. Scientific Reports, 12, 18611(2022).

[128] Li Z Y, Chen Y, Wang S X et al. Lithium niobate electro-optical modulator based on ion-cut wafer scale heterogeneous bonding on patterned SOI wafers[J]. Photonics Research, 13, 106-112(2025).

[129] Vanackere T, Vandekerckhove T, Bogaert L et al. Heterogeneous integration of a high-speed lithium niobate modulator on silicon nitride using micro-transfer printing[J]. APL Photonics, 8, 086102(2023).

[130] Feng C L, Zhang Y, Shen J et al. Ultra-low-power tunable topological photonic filter on hybrid integrated lithium tantalite and silicon platform[J]. Laser & Photonics Reviews, 18, 2300360(2024).

[131] Alexander K, George J P, Verbist J et al. Nanophotonic Pockels modulators on a silicon nitride platform[J]. Nature Communications, 9, 3444(2018).

[132] Zhou W F, Zhang Y, Jiang Y H et al. Integrated electro-optic modulator on a lead zirconate titanate-silicon nitride heterogeneous platform[J]. Optics Letters, 49, 6353-6356(2024).

[133] Tao M X, Zhang B T, Zhao T X et al. Towards high quality transferred barium titanate ferroelectric hybrid integrated modulator on silicon[J]. Light: Advanced Manufacturing, 5, 31(2024).

[134] Abel S, Eltes F, Ortmann J E et al. Large Pockels effect in micro- and nanostructured barium titanate integrated on silicon[J]. Nature Materials, 18, 42-47(2018).

[135] Ortmann J E, Eltes F, Caimi D et al. Ultra-low-power tuning in hybrid barium titanate‒silicon nitride electro-optic devices on silicon[J]. ACS Photonics, 6, 2677-2684(2019).

[136] Eppenberger M, Messner A, Bitachon B I et al. Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance[J]. Nature Photonics, 17, 360-367(2023).

[137] Chen G Y, Yu Y, Shi Y et al. High-speed photodetectors on silicon photonics platform for optical interconnect[J]. Laser & Photonics Reviews, 16, 2200117(2022).

[138] Michel J, Liu J F, Kimerling L C. High-performance Ge-on-Si photodetectors[J]. Nature Photonics, 4, 527-534(2010).

[139] Yin T, Cohen R, Morse M M et al. 31 GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator substrate[J]. Optics Express, 15, 13965-13971(2007).

[140] Lischke S, Peczek A, Morgan J S et al. Ultra-fast germanium photodiode with 3-dB bandwidth of 265 GHz[J]. Nature Photonics, 15, 925-931(2021).

[141] Shi Y, Li X, Chen G Y et al. Avalanche photodiode with ultrahigh gain‒bandwidth product of 1,033 GHz[J]. Nature Photonics, 18, 610-616(2024).

[142] Feng S Q, Geng Y, Lau K M et al. Epitaxial Ⅲ-Ⅴ-on-silicon waveguide butt-coupled photodetectors[J]. Optics Letters, 37, 4035-4037(2012).

[143] Xue Y, Han Y, Tong Y Y et al. High-performance Ⅲ-Ⅴ photodetectors on a monolithic InP/SOI platform[J]. Optica, 8, 1204-1209(2021).

[144] Kim H, Ahn S Y, Kim S et al. InAs/GaAs quantum dot infrared photodetector on a Si substrate by means of metal wafer bonding and epitaxial lift-off[J]. Optics Express, 25, 17562-17570(2017).

[145] Guo X W, Shao L B, He L Y et al. High-performance modified uni-traveling carrier photodiode integrated on a thin-film lithium niobate platform[J]. Photonics Research, 10, 1338-1343(2022).

[146] Xia F N, Mueller T, Lin Y M et al. Ultrafast graphene photodetector[J]. Nature Nanotechnology, 4, 839-843(2009).

[147] Ma P, Salamin Y, Baeuerle B et al. Plasmonically enhanced graphene photodetector featuring 100 Gbit/s data reception, high responsivity, and compact size[J]. ACS Photonics, 6, 154-161(2019).

[148] Yin Y L, Cao R, Guo J S et al. High-speed and high-responsivity hybrid silicon/black-phosphorus waveguide photodetectors at 2 µm[J]. Laser & Photonics Reviews, 13, 1900032(2019).

[149] Xia K, Liu H Y, Qiu Y et al. Waveguide-integrated van der Waals heterostructure photodetector on a lithium niobate on insulator platform[J]. Optics Letters, 49, 3162-3165(2024).

[150] Xu W H, Guo Y Y, Li X H et al. Fully integrated solid-state LiDAR transmitter on a multi-layer silicon-nitride-on-silicon photonic platform[J]. Journal of Lightwave Technology, 41, 832-840(2023).

[151] Li Y Z, Chen B S, Na Q X et al. Wide-steering-angle high-resolution optical phased array[J]. Photonics Research, 9, 2511-2518(2021).

[152] Wu Y H, Jiang R T, Wang Y Q et al. Hybrid integrated silicon nitride optical phased array with phase calibration for two-dimensional beam steering[J]. Optics Express, 33, 11123-11137(2025).

[153] Im C S, Kim S M, Lee K P et al. Hybrid integrated silicon nitride‒polymer optical phased array for efficient light detection and ranging[J]. Journal of Lightwave Technology, 39, 4402-4409(2021).

[154] Lee W B, Kwon Y J, Kim D H et al. Hybrid integrated thin-film lithium niobate‒silicon nitride electro-optical phased array incorporating silicon nitride grating antenna for two-dimensional beam steering[J]. Optics Express, 32, 9171-9183(2024).

[155] Marpaung D, Yao J P, Capmany J. Integrated microwave photonics[J]. Nature Photonics, 13, 80-90(2019).

[156] Li J C, Yang S G, Chen H W et al. Fully integrated hybrid microwave photonic receiver[J]. Photonics Research, 10, 1472-1483(2022).

[157] Tao Y S, Shu H W, Wang X J et al. Hybrid-integrated high-performance microwave photonic filter with switchable response[J]. Photonics Research, 9, 1569-1580(2021).

[158] Zheng Y, Han Z, Wang L H et al. Integrated microwave photonics multi-parameter measurement system[J]. Laser & Photonics Reviews, 19, 2500013(2025).

[159] Han Z, Wang L H, Zheng Y et al. Integrated ultra-wideband tunable Fourier domain mode-locked optoelectronic oscillator[J]. Laser & Photonics Reviews, 19, 2402094(2025).

[160] Wang L H, Han Z, Zheng Y et al. Integrated ultra-wideband dynamic microwave frequency identification system in lithium niobate on insulator[J]. Laser & Photonics Reviews, 18, 2400332(2024).

[161] Cuyvers S, Haq B, Op de Beeck C et al. Low noise heterogeneous Ⅲ-Ⅴ-on-silicon-nitride mode-locked comb laser[J]. Laser & Photonics Reviews, 15, 2000485(2021).

[162] Guo Q S, Gutierrez B K, Sekine R et al. Ultrafast mode-locked laser in nanophotonic lithium niobate[J]. Science, 382, 708-713(2023).

[163] Ling J W, Gao Z D, Xue S X et al. Electrically empowered microcomb laser[J]. Nature Communications, 15, 4192(2024).

[164] Luntadila Lufungula I, Shams-Ansari A, Renaud D et al. Integrated resonant electro-optic comb enabled by platform-agnostic laser integration[J]. Laser & Photonics Reviews, 18, 2400205(2024).

[165] Feng F, Huo D W, Zhang Z Y et al. Symbiotic evolution of photonics and artificial intelligence: a comprehensive review[J]. Advanced Photonics, 7, 024001(2025).

[166] Feldmann J, Youngblood N, Karpov M et al. Parallel convolutional processing using an integrated photonic tensor core[J]. Nature, 589, 52-58(2021).

[167] Zhu S G, Zhang Z Y, Tang W W et al. High-resolution optical convolutional neural networks using phase-change material-based microring hybrid waveguides[J]. Advanced Photonics Research, 5, 2470033(2024).

[168] Wei M L, Xu K, Tang B et al. Monolithic back-end-of-line integration of phase change materials into foundry-manufactured silicon photonics[J]. Nature Communications, 15, 2786(2024).

[169] Shi Y, Ren J Y, Chen G Y et al. Nonlinear germanium-silicon photodiode for activation and monitoring in photonic neuromorphic networks[J]. Nature Communications, 13, 6048(2022).

[170] Zhong C Y, Liao K, Dai T X et al. Graphene/silicon heterojunction for reconfigurable phase-relevant activation function in coherent optical neural networks[J]. Nature Communications, 14, 6939(2023).

[171] Chen C D, Yang Z, Wang T et al. Ultra-broadband all-optical nonlinear activation function enabled by MoTe2/optical waveguide integrated devices[J]. Nature Communications, 15, 9047(2024).

[172] Lin J J, You T G, Jin T T et al. Wafer-scale heterogeneous integration InP on trenched Si with a bubble-free interface[J]. APL Materials, 8, 051110(2020).

[173] Kim J H, Aghaeimeibodi S, Richardson C J K et al. Hybrid integration of solid-state quantum emitters on a silicon photonic chip[J]. Nano Letters, 17, 7394-7400(2017).

[174] McPhillimy J, Guilhabert B, Klitis C et al. High accuracy transfer printing of single-mode membrane silicon photonic devices[J]. Optics Express, 26, 16679-16688(2018).

[175] Wan N H, Lu T J, Chen K C et al. Large-scale integration of artificial atoms in hybrid photonic circuits[J]. Nature, 583, 226-231(2020).

[176] McPhillimy J, Jevtics D, Guilhabert B J E et al. Automated nanoscale absolute accuracy alignment system for transfer printing[J]. ACS Applied Nano Materials, 3, 10326-10332(2020).