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Chinese Journal of Lasers, Volume. 45, Issue 8, 804008(2018)

Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

Zhang Lu1,2 and Xiang Yang1
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  • 2[in Chinese]
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    Zhang Lu, Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 804008

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 15, 2018

    Accepted: --

    Published Online: Aug. 11, 2018

    The Author Email:

    DOI:10.3788/CJL201845.0804008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology