Fig. 1. Schematic of grating lateral shearing interferometer

Fig. 2. Interferogram acquired when tested lens is at different angular positions. (a) 0°; (b) 45°; (c) 90°; (d) 180°

Fig. 3. Wavefront aberrations of tested lens at different angular positions. (a) 0°; (b) 45°; (c) 90°; (d) 180°

Fig. 4. Wavefront aberrations at different angular positions after systemic errors are removed by 45° single-rotation algorithm[9]. (a) 0°; (b) 45°; (c) 90°; (d) 180°

Fig. 5. Wavefront aberrations at different angular positions after systemic errors are removed by error separation algorithm [12]. (a) 0°; (b) 45°; (c) 90°; (d) 180°

Fig. 6. Coefficients of the first 36-terms in Zernikepolynomial of systemic errors acquired by two algorithms