Chinese Journal of Lasers, Volume. 45, Issue 8, 804008(2018)

Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

Zhang Lu1,2 and Xiang Yang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm.

    Tools

    Get Citation

    Copy Citation Text

    Zhang Lu, Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 804008

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Measurement and metrology

    Received: Mar. 15, 2018

    Accepted: --

    Published Online: Aug. 11, 2018

    The Author Email:

    DOI:10.3788/CJL201845.0804008

    Topics