Ultrafast Laser Multifocus Parallel Processing of Single‐Crystalline Diamond

Qiang Fu; Jing Qian; Guande Wang; Dashuai Su; Xin Feng; Quanzhong Zhao

doi:10.3788/CJL240451

Chinese Journal of Lasers, Volume. 51, Issue 16, 1602401(2024)

Ultrafast Laser Multifocus Parallel Processing of Single‐Crystalline Diamond

Qiang Fu^1,2, Jing Qian^1,2, Guande Wang^1,2, Dashuai Su³, Xin Feng³, and Quanzhong Zhao^1,2、*

¹State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Shanghai Aircraft Manufacturing Co., Ltd., Shanghai 201324, China

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References(33)

[1] Wang H F, Sun K, Sun S Z et al. Femtosecond laser induced microstructures in diamond and applications (invited)[J]. Infrared and Laser Engineering, 49, 20201057(2020).

[2] Granados E, Martinez-Calderon M, Gomez M et al. Photonic structures in diamond based on femtosecond UV laser induced periodic surface structuring (LIPSS)[J]. Optics Express, 25, 15330-15335(2017).

[3] Wang W H, Dai B, Wang Y et al. Recent progress of diamond optical window-related components[J]. Materials Science and Technology, 28, 42-57(2020).

[4] Coad E J, Pickles C S J, Jilbert G H et al. Aerospace erosion of diamond and diamond coatings[J]. Diamond and Related Materials, 5, 640-643(1996).

[5] Xue Y X, Feng X, Roberts S C et al. Diamond and carbon nanostructures for biomedical applications[J]. Functional Diamond, 1, 221-242(2021).

[6] Nowicki P, Czarniewska E. Nanodiamonds: unique nanoparticles for use in biomedicine and biotechnology[J]. Postepy Biochemii, 65, 247-262(2020).

[7] Heinrich G, Grögler T, Rosiwal S M et al. CVD diamond coated titanium alloys for biomedical and aerospace applications[J]. Surface and Coatings Technology, 94/95, 514-520(1997).

[8] Pandey P C, Shukla S, Pandey G et al. Nanostructured diamond for biomedical applications[J]. Nanotechnology, 32, 132001(2021).

[9] Greentree A D, Fairchild B A, Hossain F M et al. Diamond integrated quantum photonics[J]. Materials Today, 11, 22-31(2008).

[10] Wei X Y, Wen Q L, Lu J et al. Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser[J]. Chinese Journal of Lasers, 49, 1002406(2022).

[11] Dong C Y, Zhang X Y, Gu D H et al. Analysis of diamond micropores forming and defects characteristics under different laser powers[J]. Chinese Journal of Lasers, 50, 2402404(2023).

[12] Wort C J H, Balmer R S. Diamond as an electronic material[J]. Materials Today, 11, 22-28(2008).

[13] Ramesham R. Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process[J]. Thin Solid Films, 340, 1-6(1999).

[14] Sun H Y, Shen X L, Sang L W et al. Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS[J]. Applied Physics Express, 14, 045501(2021).

[15] Chia C, Machielse B, Shams-Ansari A et al. Development of hard masks for reactive ion beam angled etching of diamond[J]. Optics Express, 30, 14189-14201(2022).

[16] Martínez-Calderon M, Azkona J J, Casquero N et al. Tailoring diamond’s optical properties via direct femtosecond laser nanostructuring[J]. Scientific Reports, 8, 14262(2018).

[17] Lu F X, Guo H B, Guo S B et al. Magnetron sputtered oxidation resistant and antireflection protective coatings for freestanding diamond film IR windows[J]. Diamond and Related Materials, 18, 244-248(2009).

[18] Zhang Z Y, Wei J J, Xing Z F et al. Study on infrared anti-reflection performance of diamond film with surface microstructure[J]. Infrared and Laser Engineering, 50, 20200199(2021).

[19] Zhang W L, Shi X Y, Hong R J et al. Research progress in preparation technology of diamond anti-reflection micro-nano structure[J]. Chinese Journal of Lasers, 50, 0802402(2023).

[20] Kononenko V V, Kononenko T V, Konov V I et al. Formation of antireflection microstructures on the surfaces of diamond plates by the laser patterning method[J]. Quantum Electronics, 29, 158-162(1999).

[21] Komlenok M S, Kononenko V V, Ralchenko V G et al. Laser induced nanoablation of diamond materials[J]. Physics Procedia, 12, 37-45(2011).

[22] Dou Z Q, Xiao C J, Li Z X. Research progress of diamond surface etching technology[J]. Surface Technology, 47, 90-95(2018).

[23] Taniguchi J, Ohno H, Kawabata Y et al. Ion-beam processing of single crystal diamond using SOG mask[J]. Vacuum, 80, 793-797(2006).

[24] Eberle G, Dold C, Wegener K. Laser fabrication of diamond micro-cutting tool-related geometries using a high-numerical aperture micro-scanning system[J]. The International Journal of Advanced Manufacturing Technology, 81, 1117-1125(2015).

[25] Dou J, Sun Y, Xu M X et al. Process research on micro-machining diamond microgroove by femtosecond laser[J]. Integrated Ferroelectrics, 198, 9-19(2019).

[26] Jin T Y, Chen J Y, Zhang S K et al. Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling[J]. Journal of Manufacturing Processes, 60, 247-256(2020).

[27] Mastellone M, Bellucci A, Girolami M et al. Deep-subwavelength 2D periodic surface nanostructures on diamond by double-pulse femtosecond laser irradiation[J]. Nano Letters, 21, 4477-4483(2021).

[28] He F, Sun H Y, Huang M et al. Rapid fabrication of optical volume gratings in Foturan glass by femtosecond laser micromachining[J]. Applied Physics A, 97, 853-857(2009).

[29] Zhang C C, Hu Y L, Du W Q et al. Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels[J]. Scientific Reports, 6, 33281(2016).

[30] Hirano M, Kawamura K I, Hosono H. Encoding of holographic grating and periodic nano-structure by femtosecond laser pulse[J]. Applied Surface Science, 197/198, 688-698(2002).

[31] Kato J I, Takeyasu N, Adachi Y et al. Multiple-spot parallel processing for laser micronanofabrication[J]. Applied Physics Letters, 86, 044102(2005).

[32] Yang L, El-Tamer A, Hinze U et al. Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator[J]. Optics and Lasers in Engineering, 70, 26-32(2015).

[33] Ali B, Litvinyuk I V, Rybachuk M. Femtosecond laser micromachining of diamond: current research status, applications and challenges[J]. Carbon, 179, 209-226(2021).

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Qiang Fu, Jing Qian, Guande Wang, Dashuai Su, Xin Feng, Quanzhong Zhao. Ultrafast Laser Multifocus Parallel Processing of Single‐Crystalline Diamond[J]. Chinese Journal of Lasers, 2024, 51(16): 1602401

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Jan. 3, 2024

Accepted: Feb. 5, 2024

Published Online: Jul. 29, 2024

The Author Email: Quanzhong Zhao (zqz@siom.ac.cn)

DOI:10.3788/CJL240451

CSTR:32183.14.CJL240451

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology