Fig. 1. Schematic diagram of ultrafast laser multifocus parallel processing

Fig. 2. 5×5 multifocus array light field generated by spatial light modulator. (a) Design diagram of multifocus light field; (b) phase diagram of multifocus light field; (c)‒(d) three-dimensional and two-dimensional morphologies of multifocus light field

Fig. 3. Roughness analysis of the diamond hemispheres by confocal laser scanning microscopy. (a) Original morphology extraction; (b) the fitted standard hemispherical morphology extraction; (c) obtaining surface roughness (the original morphology minus standard hemisphere)

Fig. 4. SEM images and confocal laser scanning 3D morphology of the spherical microstructure on the diamond surface processed at different layer spacings

Fig. 5. Contour line comparison of spherical microstructure at different layer spacings

Fig. 6. SEM images of spherical microstructures processed at different laser powers. (a) 0.8 W; (b) 0.6 W; (c) 0.4 W; (d) 0.3 W;

Fig. 7. Dependence of surface roughness of spherical microstructure on laser power

Fig. 8. SEM images of different arrays on diamond surface by mult-focus ultrafast laser parallel processing. (a)(e)(i) Cylindrical array; (b)(f)(j) spherical array; (c)(g)(k) pyramidal array; (d)(h)(l) conical array; (a)‒(d) top view; (e)‒(h) side view at 50°; (i)‒(l) locally enlarged side view at 50°

Fig. 9. SEM images of small-sized cylindrical arrays on diamond surface by multifocus ultrafast laser parallel processing. (a) SEM side view; (b)‒(c) two-dimensional profiles of cylindrical array

Fig. 10. EDS analysis of the diamond surface at the laser unprocessed zone. (a) Selected zone for EDS analysis; (b) element distribution of carbon; (c) element distribution of aurum; (d) the element distribution spectrum of the selected zone

Fig. 11. EDS analysis of the diamond surface at the laser processed zone. (a) Selected zone for EDS analysis; (b) element distribution of carbon ; (c) element distribution of oxygen; (d) the element distribution spectrum of the selected zone

Fig. 12. Raman analysis of diamond surface at different zones. (a) Two zones for Raman spectroscopy analysis; (b) Raman spectra of unprocessed and processed zones