Acta Photonica Sinica, Volume. 54, Issue 3, 0331001(2025)
Preparation of Coated-monocapillary by Atomic Layer Deposition Method Based on Fluent Simulation
Fig. 3. Model overall mesh and capillary partially encrypted mesh results
Fig. 5. Velocity vector diagrams of the overall and capillary parts of the three models
Fig. 8. Mass fraction of TDMAH inside the chamber as a function of time
Fig. 10. Cross-section SEM images of three coated-monocapillaries at three locations
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Huibin ZHAO, Yanli LI, Wensi LV, Xiangdong KONG, Li HAN, He ZHANG. Preparation of Coated-monocapillary by Atomic Layer Deposition Method Based on Fluent Simulation[J]. Acta Photonica Sinica, 2025, 54(3): 0331001
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Received: Sep. 5, 2024
Accepted: Sep. 30, 2024
Published Online: Apr. 22, 2025
The Author Email: Yanli LI (liyanli@mail.iee.ac.cn), He ZHANG (zhanghe@mail.iee.ac.cn)