Acta Photonica Sinica, Volume. 54, Issue 3, 0331001(2025)

Preparation of Coated-monocapillary by Atomic Layer Deposition Method Based on Fluent Simulation

Huibin ZHAO... Yanli LI*, Wensi LV, Xiangdong KONG, Li HAN and He ZHANG* |Show fewer author(s)
Author Affiliations
  • Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China
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    Figures & Tables(12)
    Structure of ALD chamber
    Three model structure diagrams
    Model overall mesh and capillary partially encrypted mesh results
    Three model flow diagram
    Velocity vector diagrams of the overall and capillary parts of the three models
    Contour of TDMAH mass fraction change during 0.10 s
    Contour of TDMAH mass fraction change from 1s to 25 s
    Mass fraction of TDMAH inside the chamber as a function of time
    Images of one coated monocapillary and its cross-section
    Cross-section SEM images of three coated-monocapillaries at three locations
    • Table 1. List of boundary condition parameters

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      Table 1. List of boundary condition parameters

      Boundary conditionBoundary typeNumerical value
      InletVelocity-inlet0.001 m/s
      OutletPressure-outlet26 Pa
      Wall temperatureWall150 ℃
      Reference pressure26 Pa
      Operating pressure0 Pa
    • Table 2. Gas mass flow rate at inlet,outlet and capillary cross-section

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      Table 2. Gas mass flow rate at inlet,outlet and capillary cross-section

      PositionModel 1/(kg·s-1Model 2/(kg·s-1Model 3/(kg·s-1
      Inlet3.924 693 1×10-113.924 708 1×10-113.937 437 2×10-11
      Outlet3.924 693 1×10-113.924 708 1×10-111.820 605×10-14
      Capillary cross-section4.318 278 3×10-179.786 363 6×10-171.757 381×10-14
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    Huibin ZHAO, Yanli LI, Wensi LV, Xiangdong KONG, Li HAN, He ZHANG. Preparation of Coated-monocapillary by Atomic Layer Deposition Method Based on Fluent Simulation[J]. Acta Photonica Sinica, 2025, 54(3): 0331001

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    Paper Information

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    Received: Sep. 5, 2024

    Accepted: Sep. 30, 2024

    Published Online: Apr. 22, 2025

    The Author Email: Yanli LI (liyanli@mail.iee.ac.cn), He ZHANG (zhanghe@mail.iee.ac.cn)

    DOI:10.3788/gzxb20255403.0331001

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