Chinese Journal of Lasers, Volume. 52, Issue 8, 0802405(2025)

Study on Defect Characteristics of CVD Diamond Microgrooves Etched by Picosecond Laser

Longchao Cao1, Wenxing Hu1, Juntao Wang1, Weihong Li1, Wentao Guo1, Wang Cai1、*, and Congyi Wu2,3、**
Author Affiliations
  • 1Hubei Key Laboratory of Digital Textile Equipment, School of Mechanical Engineering & Automation, Wuhan Textile University, Wuhan 430073, Hubei , China
  • 2School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei , China
  • 3State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, Hubei , China
  • show less
    References(32)

    [3] Zhang S K. Study on femtosecond laser microstructural processing technology of single crystal diamond[D](2021).

    [9] Zhao Z Y, Feng Y S, Luo Z Y et al. Diamond polishing based on laser composite technology[J]. Chinese Journal of Lasers, 51, 1602210(2024).

    [18] Wei X Y, Wen Q L, Lu J et al. Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser[J]. Chinese Journal of Lasers, 49, 1002406(2022).

    [21] Fu Q, Qian J, Zhao Q Z et al. Ultrafast laser multi-focus parallel processing of single crystalline diamond[J]. Chinese Journal of Lasers, 51, 1602409(2024).

    Tools

    Get Citation

    Copy Citation Text

    Longchao Cao, Wenxing Hu, Juntao Wang, Weihong Li, Wentao Guo, Wang Cai, Congyi Wu. Study on Defect Characteristics of CVD Diamond Microgrooves Etched by Picosecond Laser[J]. Chinese Journal of Lasers, 2025, 52(8): 0802405

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Jun. 6, 2024

    Accepted: Aug. 5, 2024

    Published Online: Apr. 2, 2025

    The Author Email: Wang Cai (wcai@wtu.edu.cn), Congyi Wu (wucongyi@hust.edu.cn)

    DOI:10.3788/CJL240945

    CSTR:32183.14.CJL240945

    Topics