Non-destructive electroluminescence inspection for LED epitaxial wafers based on soft single-contact operation

Hao Su; Jiawen Qiu; Junlong Li; Rong Chen; Jianbi Le; Xiaoyang Lei; Yongai Zhang; Xiongtu Zhou; Tailiang Guo; Chaoxing Wu

doi:10.1364/PRJ.522697

Photonics Research, Volume. 12, Issue 8, 1776(2024)

Non-destructive electroluminescence inspection for LED epitaxial wafers based on soft single-contact operation

Hao Su¹, Jiawen Qiu¹, Junlong Li¹, Rong Chen², Jianbi Le², Xiaoyang Lei³, Yongai Zhang^1,2,4, Xiongtu Zhou^1,2,5, Tailiang Guo^1,2, and Chaoxing Wu^1,2、*

Author Affiliations

¹School of Physics and Information Engineering, Fuzhou University, Fuzhou 350000, China

²Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou 350108, China

³Fujian Inspection and Research Institute for Product Quality, Fuzhou 350002, China

⁴e-mail: yongaizhang@fzu.edu.cn

⁵e-mail: xtzhou@fzu.edu.cn

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Hao Su, Jiawen Qiu, Junlong Li, Rong Chen, Jianbi Le, Xiaoyang Lei, Yongai Zhang, Xiongtu Zhou, Tailiang Guo, Chaoxing Wu, "Non-destructive electroluminescence inspection for LED epitaxial wafers based on soft single-contact operation," Photonics Res. 12, 1776 (2024)

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Paper Information

Category: Instrumentation and Measurements

Received: Mar. 6, 2024

Accepted: May. 30, 2024

Published Online: Aug. 2, 2024

The Author Email: Chaoxing Wu (chaoxing_wu@fzu.edu.cn)

DOI:10.1364/PRJ.522697

CSTR:32188.14.PRJ.522697

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology