Optimal Design of SACM Ge/Si APD Based on Poly-Si Bonding Layer

Juan Zhang; Xiaoping Su; Jiahui Li; Zhanren Wang; Shaoying Ke

doi:10.3788/CJL231048

Chinese Journal of Lasers, Volume. 51, Issue 8, 0803001(2024)

Optimal Design of SACM Ge/Si APD Based on Poly-Si Bonding Layer

Juan Zhang, Xiaoping Su, Jiahui Li, Zhanren Wang, and Shaoying Ke^*

Key Laboratory of Light Field Manipulation and System Integration Applications in Fujian Province, College of Physics and Information Engineering, Minnan Normal University, Zhangzhou 363000, Fujian , China

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Juan Zhang, Xiaoping Su, Jiahui Li, Zhanren Wang, Shaoying Ke. Optimal Design of SACM Ge/Si APD Based on Poly-Si Bonding Layer[J]. Chinese Journal of Lasers, 2024, 51(8): 0803001

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Paper Information

Category: Materials

Received: Jul. 21, 2023

Accepted: Sep. 20, 2023

Published Online: Mar. 29, 2024

The Author Email: Shaoying Ke (syke@mnnu.edu.cn)

DOI:10.3788/CJL231048

CSTR:32183.14.CJL231048

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology