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Journal of Synthetic Crystals, Volume. 50, Issue 9, 1675(2021)

Effects of Sputtering Power and Sputtering Time on the Structure and Resistivity of Mg2Si Nanocrystalline Thin Films

LIAO Yangfang1、* and XIE Quan2
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    LIAO Yangfang, XIE Quan. Effects of Sputtering Power and Sputtering Time on the Structure and Resistivity of Mg2Si Nanocrystalline Thin Films[J]. Journal of Synthetic Crystals, 2021, 50(9): 1675

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    Paper Information

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    Received: May. 19, 2021

    Accepted: --

    Published Online: Nov. 8, 2021

    The Author Email: LIAO Yangfang (723530283@qq.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology