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Acta Optica Sinica, Volume. 25, Issue 2, 203(2005)

Calibration of the Measurement System Based on Modulation Measurement Profilometry

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]2, and [in Chinese]3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calibration of the Measurement System Based on Modulation Measurement Profilometry[J]. Acta Optica Sinica, 2005, 25(2): 203

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 4, 2004

    Accepted: --

    Published Online: May. 22, 2006

    The Author Email: (shao_sy@tom.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology