Laser & Optoelectronics Progress, Volume. 57, Issue 15, 151202(2020)

Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization

Haijiao Yu1 and Guogang Zhao2、*
Author Affiliations
  • 1College of Electrical and Information, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
  • 2College of Computer Science and Engineering, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
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    References(15)

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    [10] Nakamura Y, Nakayama M, Masuda K et al. Development of active 6-DOF micro-vibration control system using giant magnetostrictive actuator[J]. Proceedings of SPIE, 3671, 229-240(1999).

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    [15] Meirovitch L. Elements of vibration analysis[M]. 2nd ed. New York: McGraw-Hill Book Company, 10-28(1986).

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    Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 11, 2019

    Accepted: Dec. 5, 2019

    Published Online: Aug. 4, 2020

    The Author Email: Guogang Zhao (545937803@qq.com)

    DOI:10.3788/LOP57.151202

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