Fig. 1. Working principle diagram of dual frequency laser interferometer

Fig. 2. Distribution diagram of triaxial length interferometer

Fig. 3. Arrangement of interferometer and accelerometer on L-shaped marble

Fig. 4. Test results of frequency response function of L-shaped marble and interferometer

Fig. 5. Test results of frequency response function of honeycomb panel

Fig. 6. Distribution of accelerometer on CCR and Z axis direction moving metal plate

Fig. 7. Test results of frequency response function of movable mechanism and mirror. (a) Vibration frequency response function of metal plate in X/Y axis direction; (b) vibration frequency response function of three measuring mirrors

Fig. 8. Measurement repeatability of triaxial interferometer without external vibration

Fig. 9. Fourier spectrum analysis of repeatable measurement data without external vibration

Fig. 10. Measurement repeatability of three-axis interferometer under closed loop of Z-axis motion mechanism

Fig. 11. Fourier spectrum analysis of repeatability measurement data under closed loop of Z-axis motion mechanism