[2] [2] P J Martin. Ion-based methods for optical thin film deposition[J]. Journal of Materials Science， 1986， 21(1)： 1-25.

[3] [3] Cheng-Chung Lee， Jin-Cherng Hsu， Daw-Hang Wong. The characteristics of some metallic oxides prepared in high vacuum by ion beam sputtering[J]. Applied Surface Science， 2001， 171(1-2)： 151-156.

[4] [4] G Rempe， Thompson R J， H Jeffrey， et al. Measurement of ultralow losses in an optical interferometer[J]. Optical Letters， 1992， 17(5)： 353-365.

[5] [5] Detlev Ristau， Tobias Grob. Ion beam sputter coatings for laser technology[C]. SPIE， 2005， 5963(13)： 1-12.

[6] [6] James D Targove， H Angus Macleod. Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition[J]. Applied Optics， 1988， 27(18)： 3779-3781.

[7] [7] Jurgen Becker， Volker Scheuer. Coatings for optical applications produced by ion beam sputter deposition[J]. Applied Optics， 1990， 29(28)： 4303-4309.

[8] [8] Eda Cetinorgu， Bill Baloukas， Oleg Zabeida， et al. Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering[J]. Applied Optics， 2009， 48(23)： 4536-4544.

[9] [9] Cheng-Chung Lee， Chuen-Lin Tien， Jin-Cherng Hsu. Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering[J]. Appl. Opt.， 2002， 41(10)： 2043-2047.

[13] [13] K L Lewis， A M Pitt， M Corbett， et al. Progress in optical coatings for the mid-infrared[C]. SPIE， 1996， 2966： 166-177.