OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 18, Issue 6, 86(2020)
Changing Rules of Deposition Rate with Time in Ion Beam Sputtering System
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LI Ding, LI Qian-tao, XIONG Chang-xin. Changing Rules of Deposition Rate with Time in Ion Beam Sputtering System[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2020, 18(6): 86
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Received: Nov. 26, 2019
Accepted: --
Published Online: Aug. 23, 2021
The Author Email: Ding LI (dingfengju321@126.com)
CSTR:32186.14.
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