Journal of Synthetic Crystals, Volume. 52, Issue 2, 271(2023)

Optimal Process Parameters of Preparing MoS2 Films by RF Magnetron Sputtering

ZHANG Junfeng*, SUN Zaizheng, KONG Tengfei, CAI Genwang, LI Yaping, HU Sha, and FAN Zhiqin
Author Affiliations
  • [in Chinese]
  • show less
    References(33)

    [1] [1] LIU Y, WEISS N O, DUAN X D, et al. Van der Waals heterostructures and devices[J]. Nature Reviews Materials, 2016, 1: 16042.

    [2] [2] WANG K P, WANG J, FAN J T, et al. Ultrafast saturable absorption of two-dimensional MoS2 nanosheets[J]. ACS Nano, 2013, 7(10): 9260-9267.

    [3] [3] CHEN L X, WANG H M, TANG S J, et al. Edge control of graphene domains grown on hexagonal boron nitride[J]. Nanoscale, 2017, 9(32): 11475-11479.

    [4] [4] TIWARI P, JAISWAL J, CHANDRA R. Optical and electrical tunability in vertically aligned MoS2 thin films prepared by DC sputtering: role of film thickness[J]. Vacuum, 2022, 198: 110903.

    [5] [5] ZHOU K Q, GAO R, QIAN X D. Self-assembly of exfoliated molybdenum disulfide (MoS2) nanosheets and layered double hydroxide (LDH): towards reducing fire hazards of epoxy[J]. Journal of Hazardous Materials, 2017, 338: 343-355.

    [6] [6] SHI J, WU D, ZHENG X M, et al. From MoO2@MoS2 core-shell nanorods to MoS2 nanobelts[J]. Physica Status Solidi (b), 2018, 255(9): 1800254.

    [7] [7] SHI E Z, GAO Y, FINKENAUER B P, et al. Two-dimensional halide perovskite nanomaterials and heterostructures[J]. Chemical Society Reviews, 2018, 47(16): 6046-6072.

    [8] [8] HUSSAIN S, SHEHZAD M A, VIKRAMAN D, et al. Synthesis and characterization of large-area and continuous MoS2 atomic layers by RF magnetron sputtering[J]. Nanoscale, 2016, 8(7): 4340-4347.

    [9] [9] CAO X H, TAN C L, ZHANG X, et al. Solution-processed two-dimensional metal dichalcogenide-based nanomaterials for energy storage and conversion[J]. Advanced Materials, 2016, 28(29): 6167-6196.

    [10] [10] GOVINDASAMY M, CHEN S M, MANI V, et al. Molybdenum disulfide nanosheets coated multiwalled carbon nanotubes composite for highly sensitive determination of chloramphenicol in food samples milk, honey and powdered milk[J]. Journal of Colloid and Interface Science, 2017, 485: 129-136.

    [11] [11] KIM B H, YOON H, KWON S H, et al. Direct WS2 photodetector fabrication on a flexible substrate[J]. Vacuum, 2021, 184: 109950.

    [12] [12] CHO K, PAK J, CHUNG S, et al. Recent advances in interface engineering of transition-metal dichalcogenides with organic molecules and polymers[J]. ACS Nano, 2019, 13(9): 9713-9734.

    [13] [13] CHEN B, MENG Y H, SHA J W, et al. Preparation of MoS2/TiO2 based nanocomposites for photocatalysis and rechargeable batteries: progress, challenges, and perspective[J]. Nanoscale, 2017, 10(1): 34-68.

    [14] [14] GUNDA R K, NARALA S K R. Evaluation of friction and wear characteristics of electrostatic solid lubricant at different sliding conditions[J]. Surface and Coatings Technology, 2017, 332: 341-350.

    [15] [15] BARZEGAR M, IRAJI ZAD A, TIWARI A. On the performance of vertical MoS2 nanoflakes as a gas sensor[J]. Vacuum, 2019, 167: 90-97.

    [16] [16] LUKASZKOWICZ K, KUBACKI J, BALIN K, et al. Characteristics of CrAlSiN+MoS2 coating deposited by cathodic arc and magnetron sputtering process[J]. Vacuum, 2019, 163: 360-367.

    [17] [17] LIU X, MA G J, SUN G, et al. MoSx-Ta composite coatings on steel by D.C magnetron sputtering[J]. Vacuum, 2013, 89: 203-208.

    [18] [18] GRUBER W, HADJIAMINI NAJAFABADI H, GECKLE U, et al. Crystallization of magnetron sputtered amorphous Si1-xCx films (x=1/3) studied by grazing incidence X-ray diffractometry[J]. Philosophical Magazine, 2010, 90(29): 3855-3865.

    [19] [19] GONG C Y, XIAO J R, ZHU L W, et al. Crystal structure and tribological properties of molybdenum disulfide films prepared by magnetron sputtering technology[J]. Current Applied Physics, 2019, 19(12): 1318-1324.

    [20] [20] LEI G, GUO Y G, ZHU J G, et al. Sequential subspace optimization method for electromagnetic devices design with orthogonal design technique[J]. IEEE Transactions on Magnetics, 2012, 48(2): 479-482.

    [21] [21] ZHOU K Q, JIANG S H, BAO C L, et al. Preparation of poly(vinyl alcohol) nanocomposites with molybdenum disulfide (MoS2): structural characteristics and markedly enhanced properties[J]. RSC Advances, 2012, 2(31): 11695-11703.

    [22] [22] NAN H Y, WANG Z L, WANG W H, et al. Strong photoluminescence enhancement of MoS2 through defect engineering and oxygen bonding[J]. ACS Nano, 2014, 8(6): 5738-5745.

    [23] [23] LI H, ZHANG Q, YAP C C R, et al. From bulk to monolayer MoS2: evolution of Raman scattering[J]. Advanced Functional Materials, 2012, 22(7): 1385-1390.

    [24] [24] SIROTA B, GLAVIN N, VOEVODIN A A. Room temperature magnetron sputtering and laser annealing of ultrathin MoS2 for flexible transistors[J]. Vacuum, 2019, 160: 133-138.

    [26] [26] CAI S, GUO P, LIU J Z, et al. Friction and wear mechanism of MoS2/C composite coatings under atmospheric environment[J]. Tribology Letters, 2017, 65(3): 79.

    [27] [27] PRADHAN G, SHARMA A K. Temperature controlled 1T/2H phase ratio modulation in mono- and a few layered MoS2 films[J]. Applied Surface Science, 2019, 479: 1236-1245.

    [28] [28] MATSUURA K, OHASHI T, MUNETA I, et al. Low-carrier-density sputtered MoS2 film by vapor-phase sulfurization[J]. Journal of Electronic Materials, 2018, 47(7): 3497-3501.

    [29] [29] BURMAN D, SANTRA S, PRAMANIK P, et al. Pt decorated MoS2nanoflakes for ultrasensitive resistive humidity sensor[J]. Nanotechnology, 2018, 29(11): 115504.

    [30] [30] ZHANG K, YAO J X, ZUO X Q, et al. Interconnected molybdenum disulfide@tin disulfide heterojunctions with different morphologies: a type of enhanced counter electrode for dye-sensitized solar cells[J]. CrystEngComm, 2018, 20(9): 1252-1263.

    [31] [31] ZHAO J, HE Y Y, WANG Y F, et al. An investigation on the tribological properties of multilayer graphene and MoS2 nanosheets as additives used in hydraulic applications[J]. Tribology International, 2016, 97: 14-20.

    [32] [32] PIETRZYK B, MISZCZAK S, KACZMAREK , et al. Low friction nanocomposite aluminum oxide/MoS2 coatings prepared by sol-gel method[J]. Ceramics International, 2018, 44(7): 8534-8539.

    [33] [33] GANGOPADHYAY S, ACHARYA R, CHATTOPADHYAY A K, et al. Effect of substrate bias voltage on structural and mechanical properties of pulsed DC magnetron sputtered TiN-MoSx composite coatings[J]. Vacuum, 2010, 84(6): 843-850.

    [34] [34] XIAO J R, GONG C Y, QI M, et al. Effect of TiN/C microstructure composite layer on the adhesion of FDLC film onto silicon substrate[J]. Coatings, 2018, 8(1): 18.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Junfeng, SUN Zaizheng, KONG Tengfei, CAI Genwang, LI Yaping, HU Sha, FAN Zhiqin. Optimal Process Parameters of Preparing MoS2 Films by RF Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2023, 52(2): 271

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Aug. 20, 2022

    Accepted: --

    Published Online: Mar. 18, 2023

    The Author Email: Junfeng ZHANG (Leo10zjf@163.com)

    DOI:

    CSTR:32186.14.

    Topics