Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT

Zhenzhen Wan; Shaofeng Liu; Ning Shi; Yixuan Shen; Yaning Zhao; Peng Xiong; Yongqing Wang

doi:10.3788/CJL240552

Chinese Journal of Lasers, Volume. 51, Issue 23, 2304001(2024)

Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT

Zhenzhen Wan¹, Shaofeng Liu¹, Ning Shi^1、*, Yixuan Shen^2、**, Yaning Zhao¹, Peng Xiong¹, and Yongqing Wang¹

¹Key Laboratory of Digital Medical Engineering of Hebei Province, College of Electronic and Information Engineering, Hebei University, Baoding 071002, Hebei , China

²Materials Service Safety Assessment Facilities, University of Science and Technology Beijing, Beijing 100083, China

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Zhenzhen Wan, Shaofeng Liu, Ning Shi, Yixuan Shen, Yaning Zhao, Peng Xiong, Yongqing Wang. Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT[J]. Chinese Journal of Lasers, 2024, 51(23): 2304001

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Paper Information

Category: Measurement and metrology

Received: Jan. 30, 2024

Accepted: Apr. 29, 2024

Published Online: Dec. 11, 2024

The Author Email: Ning Shi (shiningzhongguo@126.com), Yixuan Shen (d202210553@xs.ustb.edu.cn)

DOI:10.3788/CJL240552

CSTR:32183.14.CJL240552

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology