Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT

Zhenzhen Wan; Shaofeng Liu; Ning Shi; Yixuan Shen; Yaning Zhao; Peng Xiong; Yongqing Wang

doi:10.3788/CJL240552

Chinese Journal of Lasers, Volume. 51, Issue 23, 2304001(2024)

Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT

Zhenzhen Wan¹, Shaofeng Liu¹, Ning Shi^1、*, Yixuan Shen^2、**, Yaning Zhao¹, Peng Xiong¹, and Yongqing Wang¹

¹Key Laboratory of Digital Medical Engineering of Hebei Province, College of Electronic and Information Engineering, Hebei University, Baoding 071002, Hebei , China

²Materials Service Safety Assessment Facilities, University of Science and Technology Beijing, Beijing 100083, China

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Figures & Tables(18)

Fig. 1. Flow chart of glow-discharge large-size sputtering crater surface topography detection method based on SD-OCT

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Fig. 2. SD-OCT system structure

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Fig. 3. B-scan images of sputtering crater under SD-OCT system. (a) Left part of crater; (b) central part of crater; (c) right part of crater

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Fig. 4. Flow of data peak search and denoising

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Fig. 5. Schematic of data peak search

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Fig. 6. Contour of each part of crater depth reconstructed based on SD-OCT detection algorithm. (a) Left part of crater; (b) central part of crater; (c) right part of crater

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Fig. 7. Crater depth profiles before and after correction. (a) Before correction; (b) after correction

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Fig. 8. Crater depth sections with different diameters reconstructed based on SD-OCT detection algorithm. (a) 15 mm; (b) 20 mm; (c) 30 mm; (d) 40 mm

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Fig. 9. Comparison of different sputtering crater profiles under different methods. (a1)(a2) No. 1 zinc-copper sample; (b1)(b2) No. 2 zinc-copper sample; (c1)(c2) No. 3 zinc-copper sample; (d1)(d2) No. 4 zinc-copper sample

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Fig. 10. Comparison of detection results between SD-OCT detection method and white light interferometer

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Fig. 11. Standard working curves. (a) Zn; (b) Fe

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$Spectral intensities and mass fractions of Fe and Zn in galvanized sheet samples versus time. (a) Intensity; (b) mass fraction$

Fig. 12. Spectral intensities and mass fractions of Fe and Zn in galvanized sheet samples versus time. (a) Intensity; (b) mass fraction

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Table 1. Comparison among SD-OCT and commonly used surface topography detection instruments

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Table 1. Comparison among SD-OCT and commonly used surface topography detection instruments

Parameter	Contour X-500	Dektake XT	Ganymede-II SD-OCT
Field of view	3.0 mm×2.5 mm	≤4 mm	6 mm×6 mm
Vertical resolution	<0.01 nm	≤0.1 nm	1.88 μm
Horizontal resolution	0.38 μm	1 μm	1.46 μm
Measurement technology	Non-contact	Contact	Non-contact
Market price	High	Middle	Low

Table 2. Measurement accuracy of glow-discharge sputtering crater depth based on SD-OCT

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Table 2. Measurement accuracy of glow-discharge sputtering crater depth based on SD-OCT

Group No.		Sputtering crater depth of brass /μm	Sputtering crater depth of stainless steel /μm	Sputtering crater depth of galvanized plate /μm
1	40.95	57.94	15.73	16.90
2	40.22	58.82	15.46	16.68
3	41.40	57.81	15.26	16.31
4	41.50	59.07	15.34	15.99
5	41.42	59.12	14.78	16.51
6	41.52	58.80	15.90	16.89
7	40.21	57.97	14.95	16.78
Average	41.03	58.50	15.35	16.58
Standard deviation	0.59	0.57	0.40	0.34
RSD /%	1.44	0.98	2.59	2.02

Table 3. Comparison of sputtering rate data measured by SD-OCT detection method and white light interferometer

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Table 3. Comparison of sputtering rate data measured by SD-OCT detection method and white light interferometer

Sample	White light interferometer		SD-OCT detection algorithm		Relative error rate of depth /%
Sample	Depth /μm	Sputtering rate /（μm·min^-1）	Depth /μm	Sputtering rate /（μm·min^-1）	Relative error rate of depth /%
Galvanized plate	10.11	0.51	10.23	0.51	+1.19
Galvanized plate	11.54	0.58	11.13	0.56	-3.55
Galvanized plate	11.55	0.58	11.78	0.59	+1.99
Galvanized plate	12.93	0.65	12.67	0.63	-2.01
Stainless steel	19.88	0.99	19.09	1.00	-3.97
Stainless steel	19.94	1.00	19.24	0.96	-3.51
Purple copper	44.82	2.24	44.40	2.22	-0.94
Purple copper	48.13	2.41	47.04	2.35	-2.26
Brass	61.65	3.08	63.05	3.15	+2.27

Table 4. Density value and sputtering mass measurement result of each standard sample

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Table 4. Density value and sputtering mass measurement result of each standard sample

Standard sample	Sample density ρ /（g·cm^-3）	Sputtering depth h /μm	Sputtering mass m /mg
Zinc alloy 41XGLV9	7.11	45.19	227.02
Copper alloy H59	8.40	51.61	306.28
Copper-zinc alloy BS675B	8.23	43.05	250.31
Copper alloy H62	8.43	45.38	279.89
Super-alloy YSBS35504-2017	9.07	86.50	554.26
Super-alloy YSBS35503-2017	9.09	98.66	633.58
Super-alloy BS718D	8.31	65.77	386.13
Micro-alloyed steel GSB-03-2028	7.93	61.24	343.07
Stainless steel YSBS11373C	7.84	53.97	298.92
Stainless steel 2Cr13-17-3	7.85	49.95	277.02
Micro-alloyed steel GSB-03-2453	7.86	57.59	319.82

Table 5. Sputtering rate of each standard sample measured by density-depth method

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Table 5. Sputtering rate of each standard sample measured by density-depth method

Standard sample	Sputtering time t /min	Absolute sputtering rate / （mg·s^-1）	Relative sputtering rate / （mg·s^-1）
Zinc alloy 41XGLV9	10	0.38	0.24
Copper alloy H59	10	0.51	0.18
Copper-zinc alloy BS675B	10	0.42	0.22
Copper alloy H62	10	0.47	0.19
Super-alloy YSBS35504-2017	60	0.15	0.28
Super-alloy YSBS35503-2017	60	0.18	0.51
Super-alloy BS718D	60	0.11	0.84
Micro-alloyed steel GSB-03-2028	60	0.10	0.94
Stainless steel YSBS11373C	60	0.08	1.08
Stainless steel 2Cr13-17-3	60	0.08	1.17
Micro-alloyed steel GSB-03-2453	60	0.09	1.00

Table 6. Standard working curve equations and correlation coefficients of zinc and iron elements
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Table 6. Standard working curve equations and correlation coefficients of zinc and iron elements
Element
Standard working
curve equation
Correlation coefficient
Zn y=0.005x+8.190 0.999
Fe y=0.011x-2.089 0.998

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Zhenzhen Wan, Shaofeng Liu, Ning Shi, Yixuan Shen, Yaning Zhao, Peng Xiong, Yongqing Wang. Surface Topography Measurement for Large-Scale Sputter Crater with Glow Discharge Spectrometry Based on SD-OCT[J]. Chinese Journal of Lasers, 2024, 51(23): 2304001

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Paper Information

Category: Measurement and metrology

Received: Jan. 30, 2024

Accepted: Apr. 29, 2024

Published Online: Dec. 11, 2024

The Author Email: Shi Ning (shiningzhongguo@126.com), Shen Yixuan (d202210553@xs.ustb.edu.cn)

DOI:10.3788/CJL240552

CSTR:32183.14.CJL240552

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Comparison among SD-OCT and commonly used surface topography detection instruments

Table 1. Comparison among SD-OCT and commonly used surface topography detection instruments

Table 2. Measurement accuracy of glow-discharge sputtering crater depth based on SD-OCT

Table 2. Measurement accuracy of glow-discharge sputtering crater depth based on SD-OCT

Table 3. Comparison of sputtering rate data measured by SD-OCT detection method and white light interferometer

Table 3. Comparison of sputtering rate data measured by SD-OCT detection method and white light interferometer

Table 4. Density value and sputtering mass measurement result of each standard sample

Table 4. Density value and sputtering mass measurement result of each standard sample

Table 5. Sputtering rate of each standard sample measured by density-depth method

Table 5. Sputtering rate of each standard sample measured by density-depth method

Table 6. Standard working curve equations and correlation coefficients of zinc and iron elements

Table 6. Standard working curve equations and correlation coefficients of zinc and iron elements