Journal of Optoelectronics · Laser, Volume. 33, Issue 11, 1121(2022)
Biaxially tensile-strained Ge/SiGe multiple quantum wells electro-absorption modulator based on ultraviolet lithography
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HUANG Qiang, GAO Jianfeng, HUANG Chukun, JIANG Peilin, SUN Junqiang, YU Changliang. Biaxially tensile-strained Ge/SiGe multiple quantum wells electro-absorption modulator based on ultraviolet lithography[J]. Journal of Optoelectronics · Laser, 2022, 33(11): 1121
Received: May. 30, 2022
Accepted: --
Published Online: Oct. 9, 2024
The Author Email: SUN Junqiang (jqsun@hust.edu.cn)