Application of Laser Micro-Nano-Fabrication in Sensing Field

Changxiang Shao; Yang Zhao; Nan Chen; Hongwei Zhu; Lei Wang; Hongbo Sun; Liangti Qu

doi:10.3788/CJL202148.0202014

Chinese Journal of Lasers, Volume. 48, Issue 2, 0202014(2021)

Application of Laser Micro-Nano-Fabrication in Sensing Field

Changxiang Shao¹, Yang Zhao^1、*, Nan Chen¹, Hongwei Zhu², Lei Wang³, Hongbo Sun⁴, and Liangti Qu^1,5、*

¹Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, Key Laboratory of Cluster Science, Ministry of Education, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, China

²Key Laboratory for Advanced Materials Processing Technology, Ministry of Education, State Key Laboratory of Tribology, Department of Mechanical Engineering & Department of Chemistry & School of Materials & Department of Precision Instrument, Tsinghua University, Beijing 100084, China;

³School of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China

⁴Key Laboratory for Advanced Materials Processing Technology, Ministry of Education, Department of Precision Instrument, Beijing 100084, China

⁵Key Laboratory for Advanced Materials Processing Technology, Ministry of Education, State Key Laboratory of Tribology, Department of Mechanical Engineering & Department of Chemistry, Beijing 100084, China;

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Changxiang Shao, Yang Zhao, Nan Chen, Hongwei Zhu, Lei Wang, Hongbo Sun, Liangti Qu. Application of Laser Micro-Nano-Fabrication in Sensing Field[J]. Chinese Journal of Lasers, 2021, 48(2): 0202014

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Paper Information

Category: laser manufacturing

Received: Sep. 1, 2020

Accepted: Dec. 8, 2020

Published Online: Jan. 7, 2021

The Author Email: Zhao Yang (yzzhao@bit.edu.cn), Qu Liangti (yzzhao@bit.edu.cn)

DOI:10.3788/CJL202148.0202014

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology