Study on eight-pass dual-frequency laser interferometer with nanometer precision

Haijun Gao; Zhaogu Cheng; Zhigao Ning; Pinjing Cui; Huijie Huang

Chinese Optics Letters, Volume. 3, Issue 9, 09513(2005)

Haijun Gao^1,2、*, Zhaogu Cheng^1,2, Zhigao Ning^1,2, Pinjing Cui^1,2, and Huijie Huang^1,2

Author Affiliations

¹Precise Optoelectronic Measure and Control R&

²D Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

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Haijun Gao, Zhaogu Cheng, Zhigao Ning, Pinjing Cui, Huijie Huang, "Study on eight-pass dual-frequency laser interferometer with nanometer precision," Chin. Opt. Lett. 3, 09513 (2005)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Jan. 25, 2005

Accepted: --

Published Online: Jun. 6, 2006

The Author Email: Haijun Gao (gaohj@siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology