Acta Optica Sinica, Volume. 43, Issue 9, 0931003(2023)
Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter
Figures & Tables(7)
Fig. 1. XRD spectra of TiO2 samples after heat treatment at different temperatures
Fig. 2. FESEM images of TiO2 samples after heat treatment at different temperatures. (a) 200 ℃; (b) 300 ℃; (c)(d) 400 ℃
Fig. 3. AFM images and surface roughness of TiO2 samples after heat treatment at different temperatures. (a)(d) 200 ℃; (b)(e) 300 ℃; (c)(f) 400 ℃
Fig. 4. Refractive index curves of TiO2 samples after heat treatment at different temperatures
Fig. 6. Variation curves of resonance wavelength of TiO2 samples with reflectance after heat treating at different temperatures
Table 1. Thin film structure and optical property parameters of TiO2 samples after heat treatment at different temperatures
View tableTable 1. Thin film structure and optical property parameters of TiO2 samples after heat treatment at different temperatures
Heat treatment temperature /℃ Crystal structure Grain size /Å Surface
roughness /nm
Thickness /nm Resonant wavelength /nm FWHM 100 Amorphous — — — — — 200 Anatase 380.2 0.262 80.5 946.9 0.74 300 Anatase 390.3 0.270 80.7 959.4 0.77 400 Anatase 423.6 0.326 80.8 967.9 0.79
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He Zhang, Yichen Ping, Fei Qu. Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter[J]. Acta Optica Sinica, 2023, 43(9): 0931003
Paper Information
Category: Thin Films
Received: Oct. 26, 2022
Accepted: Nov. 25, 2022
Published Online: May. 9, 2023
The Author Email: Qu Fei (qufei@mail.iee.ac.cn)
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