Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter

He Zhang; Yichen Ping; Fei Qu

doi:10.3788/AOS221881

Acta Optica Sinica, Volume. 43, Issue 9, 0931003(2023)

Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter

He Zhang, Yichen Ping, and Fei Qu^*

Research Department of Micro-Nano Fabrication Technology and Intelligent Electronic Equipment Devices, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

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He Zhang, Yichen Ping, Fei Qu. Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter[J]. Acta Optica Sinica, 2023, 43(9): 0931003

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Paper Information

Category: Thin Films

Received: Oct. 26, 2022

Accepted: Nov. 25, 2022

Published Online: May. 9, 2023

The Author Email: Fei Qu (qufei@mail.iee.ac.cn)

DOI:10.3788/AOS221881

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