Chinese Optics Letters, Volume. 13, Issue Suppl., S23101(2015)

Mechanism of the smart cut of LiTaO3 by hydrogen ion implantation

Changdong Ma, Fei Lu*, and Bo Xu
Author Affiliations
  • School of Information Science and Engineering, Shandong University, Jinan 250100, China
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    Changdong Ma, Fei Lu, Bo Xu, "Mechanism of the smart cut of LiTaO3 by hydrogen ion implantation," Chin. Opt. Lett. 13, S23101 (2015)

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    Paper Information

    Category: Thin films

    Received: Jan. 15, 2015

    Accepted: Mar. 10, 2015

    Published Online: Aug. 8, 2018

    The Author Email: Fei Lu (feilu@sdu.edu.cn)

    DOI:10.3788/COL201513.S23101

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