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Acta Optica Sinica, Volume. 43, Issue 11, 1113002(2023)

Robustness Analysis Method and Simulation Research of Alignment Mark

Guangying Zhou1,3, Yuejing Qi1,3、*, Liang Li2, Miao Jiang2, Jiangliu Shi2, and Mingyi Yao1,3
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2Beijing Superstring Academy of Memory Technology, Beijing 100176, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

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    Guangying Zhou, Yuejing Qi, Liang Li, Miao Jiang, Jiangliu Shi, Mingyi Yao. Robustness Analysis Method and Simulation Research of Alignment Mark[J]. Acta Optica Sinica, 2023, 43(11): 1113002

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    Paper Information

    Category: Integrated Optics

    Received: Dec. 20, 2022

    Accepted: Feb. 10, 2023

    Published Online: Jun. 13, 2023

    The Author Email: Qi Yuejing (qiyuejing@ime.ac.cn)

    DOI:10.3788/AOS222161

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology