[1] AHMAD Z, LIAO Y M, WANG P S et al. Avalanche photodiodes with composite charge-layers for low dark current, high-speed, and high-power performance[J]. IEEE Journal of Selected Topics in Quantum Electronics, 28, 1-10(2021).

[2] NADA M, NAKAJIMA F, YOSHIMATSU T et al. Inverted p-down design for high-speed photodetectors[C], 8, 39(2021).

[3] CHAO E, XIONG B, SUN C et al. Ultrafast modified uni-traveling carrier photodiode with 3-dB bandwidth of 150 GHz[C], SM1D. 3(2021).

[4] ZHANG H, ZHAO Y, LI Q et al. Metalens array for InGaAs/InP avalanche photodiodes at optical-communication wavelengths[J]. Optics Communications, 514, 128159(2022).

[5] YANG Xue, SUN Huilai, YUE Duanmu et al. Research progress of microlens arrays prepared by femtosecond laser[J]. Laser and Optoelectronics Progress, 58, 0500005(2021).

[6] LI Qingwei, YIN Shunzheng, SONG Hongwei et al. Design and fabrication of InP microlens[J]. Microelectronic Technology, 55, 296-301(2018).

[7] HUANG Xiaofeng, CHEN Wei, DONG Xufeng et al. A 25 Gbit/s high speed InAlAs avalanche photodiode with back incidence[J]. Semiconductor Optoelectronics, 43, 122(2022).

[8] ZHANG B, YIN S, LIU Y et al. High performance InGaAs/InP single-photon avalanche diode using DBR-metal reflector and backside micro-lens[J]. Journal of Lightwave Technology, 40, 3832-3838(2022).

[9] NUSSBAUM P, VOELKEL R, HERZIG H P et al. Design, fabrication and testing of microlens arrays for sensors and microsystems[J]. Pure and applied optics: Journal of the European Optical Society Part A, 6, 617(1997).

[10] SHENG Shuwu, LI Linhai, XIN Zhihui et al. Uncertainty analysis and system deviation correction for focal length measurement of convex lens[J]. Acta Optica Sinica, 41, 1412001(2021).

[11] LI Jianjun, CHU Chunyan, LU Weitong et al. Advances in fabrication and application of microlens arrays[J]. Acta Optica Sinica, 41, 2100001(2021).

[12] WEI Y, LI L H, LEE W B et al. Fabrication of microlens array and its application: a review[J]. Chinese Journal of Mechanical Engineering, 31, 16(2018).

[13] CHEN Changfeng, ZHENG Yi, FANG Chaolong et al. Microlens array membrane enhances the luminescence efficiency and stability of CsPbBr3 quantum dot films[J]. Chinese Journal of Lasers, 48, 1313001(2021).

[14] FENG Xianfei, DENG Jun, LIU Ming et al. Fabrication of microlens array for short-wave infrared detector[J]. Opto-electronic Engineering, 44, 633-637(2017).

[15] AUDRAN S, FAURE B, MORTINI B et al. Study of dynamical formation and shape of microlenses formed by the reflow method[C], 6153, 1368-1377(2006).

[16] LIU Z, ABBASI H N, ZHU T F et al. Fabrication of micro lens array on diamond surface[J]. AIP Advances, 9, 125218(2019).

[17] ZHU T F, LIU Z, LIU Z et al. Fabrication of monolithic diamond photodetector with microlenses[J]. Optics Express, 25, 31586(2017).

[18] LIU Z, ZHU T F, WANG Y F et al. Fabrication of diamond submicron lenses and cylinders by ICP etching technique with SiO2 balls mask[J]. Materials, 12, 1622(2019).

[19] SUN C, WANG J, ZHOU Q et al. Room temperature dry etching of InP-based semiconductors for optoelectronic device fabrication using inductively coupled plasma[C], 229-232(2007).