Fig. 1. Schematic of an integrated microlens device

Fig. 2. Light field diagram of collimated incident light passing through a microlens

Fig. 3. Light field diagram of diverging incident light passing through a microlens

Fig. 4. Schematic of the process of photoresist hot melt

Fig. 5. Light microscope image of colloidal Au plating

Fig. 6. SEM image of colloidal Au plating

Fig. 7. Microlens heights at different chamber pressures

Fig. 8. Microlens heights with different Ar flows

Fig. 9. Etching time of microlens with different RF power

Fig. 10. SEM images of integrated microlenses

Fig. 11. Test picture of light detector responsivity

Fig. 12. Normalized responsivity under different reverse bias

Fig. 13. Normalized responsiveness at different locations