[1] LI S B, SONG B F, PETERSON T et al. MicroLED chromatic confocal microscope. Optics Letters, 46, 2722-2725(2021).

[2] DICKSION G. Aledia touts MicroLED chip progress. Information Display, 37(2021).

[3] XU F. Overview of MicroLED display technology. World of Digital Communications, 45-46(2021).

[4] CHAJI R, SIBOBI H Z, FATHI E. Large‐area low‐cost MicroLED TV displays. SID Symposium Digest of Technical Papers, 53, 208-211(2022).

[5] SU H, LI W H, LI J L. Research progress of wafer⁃level Micro⁃LED chip detection technology. LCD and Display, 38, 582-594(2023).

[6] ZHENG L L, GUO Z Q, WEI Y et al. Research on a camera⁃based microscopic imaging system to inspect the surface luminance of the micro⁃LED array. IEEE Access, 6, 51329-51336(2018).

[7] REMES K, FABRITIUS T. Non⁃contact characterization of flexible hybrid electronics by synchronized thermography. IEEE Transactions on Instrumentation and Measurement, 69, 2390-2397(2019).

[8] BEHRMAN K, FOUILLOUX J, IRELAND T et al. Early defect identification for micro light‐emitting diode displays via photoluminescent and cathodoluminescent imaging. Journal of the Society for Information Display, 29, 264-274(2021).

[9] SZARVAS T, MOLNAR G, NADUDVARI G et al. Bulk micro⁃defect detection with low⁃angle illumination. The Review of Scientific Instruments, 92(2021).

[10] FANG X, SHI Z. Wafer defect detection and classification algorithm based on convolutional neural network. Computer Engineering, 44, 218-223(2018).

[11] SHU Y, LI B, LIN H. Quality safety monitoring of LED chips using deep learning⁃based vision inspection methods. Measurement, 168(2021).

[12] DENG Q, ZHAO Z Y, LIN H. Design of dark field detection system for nanoparticles on wafer metal surface. China Laser, 50, 98-108(2023).

[13] PENG X, ZHAI D D, SHI F. Design of polarization detection optical system for surface defects of high reflective workpiece. Infrared and Laser Engineering, 52, 365-378(2023).

[15] CHEN L, LI Z Q. Optical system design of microscope for panel detection. Optical Instruments, 43, 42-48(2021).