Fig. 1. Inspection system for Micro⁃LED wafer defects

Fig. 2. Layout of the microscope objective

Fig. 3. Aberration of the microscope objective

Fig. 4. Parameter relationships in lighting systems

Fig. 5. Optical layout of the illumination system

Fig. 6. Distribution of irradiance

Fig. 7. Optical layout of the microscopic imaging system

Fig. 8. Aberration of the microscopic imaging system

Fig. 9. Schematic diagram of experimental setup

Fig. 10. Imaging of Micro⁃LED wafer specimens

Fig. 11. Assessment of image quality based on polarization degree