Researching | Emulation of synchrotron radiation high-resolution actinic review for EUV mask

NUCLEAR TECHNIQUES, Volume. 48, Issue 3, 030102(2025)

Emulation of synchrotron radiation high-resolution actinic review for EUV mask

Zijing SU^1,3, Haigang LIU^1,2, Xiangyu MENG^1,2, Xiangzhi ZHANG^1,2, Bo ZHAO¹, Zhi GUO^1,2, Yong WANG^1,2、**, and Renzhong TAI^1,2,3、*

Author Affiliations

¹Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

²Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

³ShanghaiTech University, Shanghai 201210, China

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References(25)

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Zijing SU, Haigang LIU, Xiangyu MENG, Xiangzhi ZHANG, Bo ZHAO, Zhi GUO, Yong WANG, Renzhong TAI. Emulation of synchrotron radiation high-resolution actinic review for EUV mask[J]. NUCLEAR TECHNIQUES, 2025, 48(3): 030102

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Paper Information

Category: SYNCHROTRON RADIATION TECHNOLOGY AND APPLICATIONS

Received: Apr. 15, 2024

Accepted: --

Published Online: Apr. 15, 2025

The Author Email: Yong WANG (王勇), Renzhong TAI (邰仁忠)

DOI:10.11889/j.0253-3219.2025.hjs.48.240151

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology