Journal of Infrared and Millimeter Waves, Volume. 43, Issue 4, 526(2024)

The physical model,structural fabrication,and DC testing of lateral gate transistor terahertz detectors

Ya-Ru KANG1,3, Hui DONG4, Jing LIU3, Zhen HUANG5, Zhao-Feng LI1,2,3、*, Wei YAN3、**, and Xiao-Dong WANG1,2,3
Author Affiliations
  • 1School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 100049,China
  • 2Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Engineering Research Center for Semiconductor Integrated Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
  • 4School of Microelectronics,University of Science and Technology of China,Hefei 230026,China
  • 5Research Center,HuBei Jiufengshan Laboratory,Wuhan 430074,China
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    For the high-electron-mobility transistor (HEMT) terahertz detector with a side-gate structure, a physical model for DC transport and terahertz detection of the device was constructed. Using a self-alignment process, well-shaped and reliable contacts for the side-gate structure were successfully fabricated, effectively solving contact issues between the dual gates and the mesa. Ultimately, terahertz detectors with different gate widths (200 nm, 800 nm, and 1400 nm) of side-gate GaN/AlGaN HEMTs were obtained. DC tests revealed a clear linear relationship between the gate widths of different devices and their threshold voltages, confirming the DC transport model of the side-gate HEMT terahertz detector. These results provide experimental verification and guidance for the theoretical model of the complete side-gate HEMT terahertz detector, offering significant support for the development of side-gate HEMT terahertz detectors.

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    Ya-Ru KANG, Hui DONG, Jing LIU, Zhen HUANG, Zhao-Feng LI, Wei YAN, Xiao-Dong WANG. The physical model,structural fabrication,and DC testing of lateral gate transistor terahertz detectors[J]. Journal of Infrared and Millimeter Waves, 2024, 43(4): 526

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    Paper Information

    Category: Research Articles

    Received: Sep. 23, 2023

    Accepted: --

    Published Online: Aug. 27, 2024

    The Author Email: Zhao-Feng LI (lizhaofeng@semi.ac.cn), Wei YAN (yanwei@semi.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2024.04.012

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