Optical Technique, Volume. 47, Issue 4, 410(2021)

Fast surface profile measurement method based on virtual double differential confocal

DENG Zhetao1、*, HE Chunjing1, HUANG Weihua1, and XU Kemi1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(18)

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    DENG Zhetao, HE Chunjing, HUANG Weihua, XU Kemi. Fast surface profile measurement method based on virtual double differential confocal[J]. Optical Technique, 2021, 47(4): 410

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    Paper Information

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    Received: Mar. 11, 2021

    Accepted: --

    Published Online: Sep. 1, 2021

    The Author Email: DENG Zhetao (dengzhetao1996@163.com)

    DOI:

    CSTR:32186.14.

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