Optical Technique, Volume. 47, Issue 4, 410(2021)
Fast surface profile measurement method based on virtual double differential confocal
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DENG Zhetao, HE Chunjing, HUANG Weihua, XU Kemi. Fast surface profile measurement method based on virtual double differential confocal[J]. Optical Technique, 2021, 47(4): 410
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Received: Mar. 11, 2021
Accepted: --
Published Online: Sep. 1, 2021
The Author Email: DENG Zhetao (dengzhetao1996@163.com)
CSTR:32186.14.
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