Fig. 1. Simplified structure of a lithography machine

Fig. 2. Illumination modes and partial coherence factor. (a) Conventional illumination; (b) annular illumination; (c) dipole illumination; (d) quadrupole illumination

Fig. 3. Structure of the uniformity unit based on MLA

Fig. 4. Schematic of the uniform effect of the integrator rod

Fig. 5. Schematics of the optical principle of the integrator rod. (a) Angle channels; (b) virtual point sub-sources

Fig. 6. Variation of the input with a uniform distribution after free propagation. (a) Uniform distribution of the input in phase space; (b) distribution in phase space after free propagation of the input; (c) irradiance distribution of the input; (d) irradiance distribution of the unfolded output

Fig. 7. Superposition distribution results of edge channels. (a) A uniform result; (b) a non-uniform result

Fig. 8. Simulation results of the output irradiance profile under different source widths in x direction. (a) Width of the source is smaller than that of the integrator rod; (b) width of the source is equal to that of the integrator rod

Fig. 9. Structure scheme of the proposed illumination uniformity unit. (a) Structure in the X direction (top view); (b) structure in the Y direction (front view)

Fig. 10. Geometric principle of the ray distribution in the uniformity unit (top view)

Fig. 11. Structure diagram of the micro-cylindrical lens

Fig. 12. Profile of absolute error of the exiting rays’ direction cosine of the micro-cylindrical lens

Fig. 13. Optical structure diagram of the condenser lens

Fig. 14. Profile of absolute error of the exiting rays’ direction cosine of the condenser lens

Fig. 15. Simulation model for the illumination uniformity unit (axonometric view)

Fig. 16. Diagram and profile of irradiance of the input illumination field under the conventional mode with σ=0.88

Fig. 17. Diagram of irradiance of the output illumination field under the conventional mode with σ=0.88

Fig. 18. Normalized integrated irradiance profiles. (a) Conventional illumination mode; (b) annular illumination mode