Optics and Precision Engineering, Volume. 15, Issue 10, 1589(2007)
Precision servo control of GMA based on compounding feedforward compensation
References(3)
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Precision servo control of GMA based on compounding feedforward compensation[J]. Optics and Precision Engineering, 2007, 15(10): 1589
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