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Optics and Precision Engineering, Volume. 15, Issue 10, 1589(2007)

Precision servo control of GMA based on compounding feedforward compensation

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Precision servo control of GMA based on compounding feedforward compensation[J]. Optics and Precision Engineering, 2007, 15(10): 1589

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    Received: Jun. 15, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology