Chinese Journal of Lasers, Volume. 33, Issue 6, 827(2006)
Influences of Deposition Temperature on Residual Stress of HfO2 Films Prepared by Electron Beam Evaporation
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influences of Deposition Temperature on Residual Stress of HfO2 Films Prepared by Electron Beam Evaporation[J]. Chinese Journal of Lasers, 2006, 33(6): 827
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