Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology

Binghua Cao; Dedong Zheng; Mengbao Fan; Fengshan Sun; Lin Liu

doi:10.3788/AOS202242.0112001

Acta Optica Sinica, Volume. 42, Issue 1, 0112001(2022)

Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology

Binghua Cao^1、*, Dedong Zheng¹, Mengbao Fan², Fengshan Sun², and Lin Liu³

Author Affiliations

¹School of Information and Control Engineering, China University of Mining and Technology, Xuzhou, Jiangsu 221000, China

²School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou, Jiangsu 221000, China

³Beijing Institute of Aerospace Metrology and Measurement Technology, Beijing 100076, China

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Binghua Cao, Dedong Zheng, Mengbao Fan, Fengshan Sun, Lin Liu. Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology[J]. Acta Optica Sinica, 2022, 42(1): 0112001

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 12, 2021

Accepted: Jul. 4, 2021

Published Online: Dec. 22, 2021

The Author Email: Binghua Cao (caobinghua@cumt.edu.cn)

DOI:10.3788/AOS202242.0112001

Topics

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Instrumentation, Measurement and Metrology