Laser & Optoelectronics Progress, Volume. 57, Issue 9, 091201(2020)

Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval

Jiayin Yu1, Jing Fan2, Xuhui Lan1, Xiaoyan Shen1、*, and Jing Yu1
Author Affiliations
  • 1College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China;
  • 2Technical Monitoring Center of Changqing Oilfield Company, Xi'an, Shaanxi 710021, China
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    Figures & Tables(7)
    Interference schematic. (a) F-P etalon interference imaging schematic; (b) flat panel enlargement
    Comparison of theoretical and simulation values
    F-P etalon spacing measurement experimental device
    Concentric interference ring pictures. (a) Concentric interference rings of 546 nm mercury green line; (b) concentric interference rings of 577 nm and 579 nm mercury yellow lines
    • Table 1. TFCalc film system design parameters

      View table

      Table 1. TFCalc film system design parameters

      FilmMaterialOpticalthicknessPhysicalthickness /nm
      1ZNSλ/459.35
      2MGF2λ/498.55
      3ZNSλ/459.35
      4MGF2λ/498.55
      5ZNSλ/459.35
      6MGF2λ/498.55
      7ZNSλ/459.35
      8MGF2λ/498.55
      9ZNSλ/459.35
    • Table 2. Results of diameter and standard deviation of imaging ring obtained by F-P etalon with three wavelengths

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      Table 2. Results of diameter and standard deviation of imaging ring obtained by F-P etalon with three wavelengths

      λa1=576.96607 nmk~01=6987; relative unit: 22wλa2=579.07252 nmk~02=6961; relative unit: 22wλa3=546.07942 nmk~03=7381; relative unit: 22w
      iDisDiiDisDiiDisDi
      1678.8670.1931584.7720.0331691.2540.010
      2867.0390.2112796.0930.0772867.7460.012
      31021.1800.1933962.2160.07531014.0560.017
      71486.5880.09171447.6840.05571460.1790.027
      81581.8440.08081546.1160.06981552.2120.031
      91671.8680.07591638.0890.05891638.4310.029
    • Table 3. Decimal ε before and after three wavelengths correction and its uncertainty

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      Table 3. Decimal ε before and after three wavelengths correction and its uncertainty

      εUεUd/dε'U'εU'd/d'
      λ10.578140.008411.2×10-60.582050.004616.9×10-7
      λ20.169890.015512.2×10-60.171440.008241.2×10-6
      λ30.733760.014722.0×10-60.736120.007771.1×10-6
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    Jiayin Yu, Jing Fan, Xuhui Lan, Xiaoyan Shen, Jing Yu. Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval[J]. Laser & Optoelectronics Progress, 2020, 57(9): 091201

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 14, 2019

    Accepted: Sep. 16, 2019

    Published Online: May. 6, 2020

    The Author Email: Xiaoyan Shen (xyshen@cjlu.edu.cn)

    DOI:10.3788/LOP57.091201

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