Spectroscopy and Spectral Analysis, Volume. 35, Issue 2, 474(2015)
Piezoresistivity of Ultra-Thin Poly-Silicon Layer by Aluminum-Induced Layer Exchange
[1] [1] French P, Evans A. Sensors and Actuaors A, 1985, 8(3): 219.
[2] [2] Barlian A, Park W T, Mallon J. Proceedings of the IEEE, 2009, 97(3): 513.
[3] [3] Berre M Le, Lemiti M, Barbier D. Sensors and Actuaors A: Physical, 1995, 46-47: 166.
[4] [4] Liu X W, Lu X B, Chuai R Y, et al. Sensors and Actuators A: Physical, 2209, 154: 42.
[5] [5] Wang M X, Meng Z G, Yitshak Zohar. IEEE Transactions on Electron Devices, 2201, 48: 794.
[6] [6] Kim H J, Im J S. Appl. Phys. Lett., 1996, 68: 1513.
[7] [7] Hatalis M K, Greve D W. J. Appl. Phys., 1988, 63: 2260.
[8] [8] Jin Z H, Bhat G A, Yeung M, et al. J. Appl. Phys., 1998, 84: 194.
[9] [9] Schneider J, Schneider A, Sarikov A. J. Non-Cryst Solids., 2206, 352: 972.
[10] [10] Wang C L, Fan D W, Sun S. Chin. Phys. Lett., 2209, 26: 01802.
[11] [11] Steffen Uhlig, Stephan Rau, Günter Schulte. Sensors and Actuators A: Physical, 2011, 172: 447.
[12] [12] French P J, Evans A G R. Solid-State Electron, 1989, 32: 1.
[14] [14] Antesberger T, Jaeger C, Scholz M. Appl. Phys. Lett., 2207, 91: 201909.
[15] [15] Wang C L, Fan D W, Miao S F. Science in China G, 2010, 53: 1.
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WANG Cheng-long, MA Jun, FAN Duo-wang, XING Da, LIU Song-hao. Piezoresistivity of Ultra-Thin Poly-Silicon Layer by Aluminum-Induced Layer Exchange[J]. Spectroscopy and Spectral Analysis, 2015, 35(2): 474
Received: May. 22, 2014
Accepted: --
Published Online: Feb. 15, 2015
The Author Email: Cheng-long WANG (clwangee@163.com)