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Spectroscopy and Spectral Analysis, Volume. 35, Issue 2, 474(2015)

Piezoresistivity of Ultra-Thin Poly-Silicon Layer by Aluminum-Induced Layer Exchange

WANG Cheng-long1、*, MA Jun1, FAN Duo-wang1,2, XING Da3, and LIU Song-hao3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WANG Cheng-long, MA Jun, FAN Duo-wang, XING Da, LIU Song-hao. Piezoresistivity of Ultra-Thin Poly-Silicon Layer by Aluminum-Induced Layer Exchange[J]. Spectroscopy and Spectral Analysis, 2015, 35(2): 474

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    Paper Information

    Received: May. 22, 2014

    Accepted: --

    Published Online: Feb. 15, 2015

    The Author Email: Cheng-long WANG (clwangee@163.com)

    DOI:10.3964/j.issn.1000-0593(2015)02-0474-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology