Chinese Journal of Lasers, Volume. 36, Issue 2, 476(2009)
Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition
[1] [1] Fan Ruiying, Fan Zhengxiu. Stress analysis of thin films and some testing results [J]. Optical Instruments, 2001, 23(5-6):84~91
[4] [4] Ning Zhu, Daniel van Wyk, Zhenxian Liang et al.. A study of thermal stress and intrinsic residual stress in planar metallization for integrated power modules [J]. IEEE Transactions on Industry Application, 2005, 41(6):1603~1611
[7] [7] Lin Kang. Interpretation of plate stress in glass strap during the course of cooling [J]. Glass, 2004, 5:4~9
[8] [8] S. P. Baker, W. D. Nix. Mechanical properties of thin films on substrates [C]. SPIE, 1990, 1323:263~276
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Zhu Pei, Zhu Jianqiang. Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition[J]. Chinese Journal of Lasers, 2009, 36(2): 476