Chinese Journal of Lasers, Volume. 36, Issue 2, 476(2009)
Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition
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Zhu Pei, Zhu Jianqiang. Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition[J]. Chinese Journal of Lasers, 2009, 36(2): 476