Acta Optica Sinica, Volume. 36, Issue 6, 612001(2016)
Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry
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Shi Zhonghua, Yang Baoxi, Hu Xiaobang, Jin Chaoqun, Wei Zhangfan, Li Jing, Huang Huijie. Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry[J]. Acta Optica Sinica, 2016, 36(6): 612001
Category: Instrumentation, Measurement and Metrology
Received: Dec. 16, 2015
Accepted: --
Published Online: Jun. 6, 2016
The Author Email: Zhonghua Shi (szh@mail.ustc.edu.cn)