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Acta Optica Sinica, Volume. 36, Issue 6, 612001(2016)

Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry

Shi Zhonghua1,2、*, Yang Baoxi1,2, Hu Xiaobang1, Jin Chaoqun1,2, Wei Zhangfan1,2, Li Jing1, and Huang Huijie1,2
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    Shi Zhonghua, Yang Baoxi, Hu Xiaobang, Jin Chaoqun, Wei Zhangfan, Li Jing, Huang Huijie. Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry[J]. Acta Optica Sinica, 2016, 36(6): 612001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 16, 2015

    Accepted: --

    Published Online: Jun. 6, 2016

    The Author Email: Zhonghua Shi (szh@mail.ustc.edu.cn)

    DOI:10.3788/aos201636.0612001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology