X-Ray Intensity Correlation Defect Detection Using a Single Speckle Pattern

Fig. 3. Test samples and detected speckle fields. (a)(e) 10-hole sample; (b)(f) circuit sample; (c)(g) 10-hole defected sample; (d)(h) circuit defected sample

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Fig. 4. Angle matching diagram of the rotation angle of the standard image and the correlation coefficient $ρ$ . (a) 10-hole sample; (b) circuit sample

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Fig. 5. Defected speckle fields under different signal-to-noise ratios. (a) $R_{S N} = 5 d B$ ; (b) $R_{S N} = 10 d B$ ; (c) $R_{S N} = 15 d B$ ; (d) $R_{S N} = 20 d B$

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Fig. 6. the variation of correlation coefficient $ρ$ and detected speckle field's image contrast adjust coefficient $γ$ with different signal-to-noise ratios

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Fig. 7. Detail enhancement results. (a) High-pass filtering result; (b) Wiener filtering result; (c) guided filtering result; (d) the cross-section of various filtering results, standard speckle, and test speckle in Fig.3(g), when $x = 0$

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Table 1. Correlation coefficient $ρ$ of the processed results and the simulated speckle field

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Table 1. Correlation coefficient $ρ$ of the processed results and the simulated speckle field

Detail enhancement measure	Standard 10-hole sample	Defected 10-hole sample	Standard circuit sample	Defected circuit sample
Detail enhancement measure	Correlation coefficient ρ /arb. units
Unprocessed	0.93	0.88	0.92	.84
High-pass filtering	0.70	0.64	0.78	0.71
Wiener filtering	0.95	0.90	0.95	0.88
Guided image filtering	0.96	0.91	0.97	0.90

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Hairui Yang, Zhijie Tan, Hong Yu, Xuejuan Pan, Shensheng Han. X-Ray Intensity Correlation Defect Detection Using a Single Speckle Pattern[J]. Acta Optica Sinica, 2023, 43(10): 1034001

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Paper Information

Category: X-Ray Optics

Received: Nov. 9, 2022

Accepted: Jan. 3, 2023

Published Online: Apr. 25, 2023

The Author Email: Yu Hong (yuhong@siom.ac.cn)

DOI:10.3788/AOS221961

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Correlation coefficient ρ of the processed results and the simulated speckle field

Table 1. Correlation coefficient ρ of the processed results and the simulated speckle field

Table 1. Correlation coefficient $ρ$ of the processed results and the simulated speckle field

Table 1. Correlation coefficient $ρ$ of the processed results and the simulated speckle field