Microelectronics, Volume. 51, Issue 2, 221(2021)

An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit

ZHANG Lin, LI Jing, FU Dongbing, WAN Xianjie, and DING Yi
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    References(4)

    [2] [2] DOORN T S, ALTHEIMER M. Ultra-fast programming of silicided polysilicon fuses based on new insights in the programming physics [C] ∥ IEEE IEDM. Washington D C, USA. 2005: 667-670.

    [3] [3] WONG C C, CHANG S P, TU H F, et al. Performance enhancement of high-current-injected electrically programmable fuse with compressive-stress nitride layer [J]. IEEE Elec Dev Lett, 2014, 35(3): 297-299.

    [5] [5] DOORN T S. A detailed qualitative model for the programming physics of silicided polysilicon fuses [J]. IEEE Trans Elec Dev, 2007, 54(12): 3285-3291.

    [6] [6] LEE W T, FLOWER A C, POWER O, et al. Blowing of polycrystalline silicon fuses [J]. Appl Phys Lett, 2010, 97(2): 023502.

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    ZHANG Lin, LI Jing, FU Dongbing, WAN Xianjie, DING Yi. An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit[J]. Microelectronics, 2021, 51(2): 221

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    Paper Information

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    Received: Aug. 3, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200353

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