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Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 409(2024)

Design and Manufacture of CD-AFM Probe Based on High-Aspect-Ratio Structure

HE Long1,2,3, LI Shuxian1, MIAO Bin2,3, LI Jiadong2,3, CHEN Ying4, MIAO Xiaopu4, and WU Sen4
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    HE Long, LI Shuxian, MIAO Bin, LI Jiadong, CHEN Ying, MIAO Xiaopu, WU Sen. Design and Manufacture of CD-AFM Probe Based on High-Aspect-Ratio Structure[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 409

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    Paper Information

    Received: Mar. 12, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.024

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology