Acta Optica Sinica, Volume. 44, Issue 8, 0826001(2024)
Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry
[1] Liu F W, Wu Y Q, Chen Q et al. Overview of advanced manufacturing technology of large-aperture aspheric mirror[J]. Opto-Electronic Engineering, 47, 200203(2020).
[2] Zhao C C, Hu M Y, Zhang S W et al. Research on compensation testing method for large-aperture and high-order aspheric surface[J]. Laser & Optoelectronics Progress, 57, 072203(2020).
[3] Liang Z J, Yang Y Y, Zhao H Y et al. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 15, 161-186(2022).
[4] Cui J L, Hu M Y, Bi Y C et al. Detection and lightweight analysis of large-diameter semi-annular high-order aspheric surface[J]. Laser & Optoelectronics Progress, 60, 0722003(2023).
[5] Wang X, Liu Q, Zhou H et al. Concave aspheric test combining dall with offner null compensation using a plane wave[J]. Applied Optics, 59, 8987-8996(2020).
[6] Liu J N, Chen A H, Li Z Y et al. High-precision shape measurement technology for convex aspheric with small aperture and large convex asphericity[J]. Infrared and Laser Engineering, 51, 20220190(2022).
[7] Bai Q, Zhang Y B, Hu M Y et al. Research on detection of high-order aspheric surfaces using double spherical reflection compensation[J]. Laser & Optoelectronics Progress, 60, 0722002(2023).
[8] Wang Z M, Qu W J, Yang F et al. Absolute measurement of aspheric lens with electrically tunable lens in digital holography[J]. Optics and Lasers in Engineering, 88, 313-318(2017).
[9] Zhu D Y, Wang F, Li P et al. Research on hybrid compensation testing of convex aspherical mirror[J]. Optics and Lasers in Engineering, 132, 106108(2020).
[10] Yan L S, Zhu D Y, Wang X K et al. Measurement of rotationally symmetric aspherical surfaces with the annular subaperture stitching method[J]. Applied Optics, 58, 7073-7079(2019).
[11] Shi T, Liu D, Zhou Y H et al. Practical retrace error correction in non-null aspheric testing: a comparison[J]. Optics Communications, 383, 378-385(2017).
[12] Elloumi M, Ahmad M A, Samak A H et al. Error correction algorithms in non-null aspheric testing next generation sequencing data[J]. Alexandria Engineering Journal, 61, 9819-9829(2022).
[13] Hou X, Wu F, Yang L et al. Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method[J]. Optics Express, 15, 12890-12899(2007).
[14] Su H, Wang X K, Cheng Q et al. Sub-aperture stiching and CGH mixed compensation for the testing of large convex asphere(invited)[J]. Infrared and Laser Engineering, 51, 20220576(2022).
[15] Chen S Y, Wu C C, Tie G P et al. Stitching test of large flats by using two orthogonally arranged wavefront interferometers[J]. Applied Optics, 56, 9193-9198(2017).
[16] Liu Y M, Lawrence G N, Koliopoulos C L. Subaperture testing of aspheres with annular zones[J]. Applied Optics, 27, 4504-4513(1988).
[17] Murphy P, Fleig J, Forbes G et al. Subaperture stitching interferometry for testing mild aspheres[J]. Proceedings of SPIE, 6293, 62930J(2006).
[18] Hao Q, Liu Y M, Hu Y et al. Interferometric measurement of optical aspheric surface form error and parameter error[J]. Acta Optica Sinica, 43, 1522003(2023).
[19] Wang H H, Ming M, Lv T Y et al. Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching[J]. Infrared and Laser Engineering, 45, 0417001(2016).
[20] Li B, Liu X, Kang X Q et al. Compensation for center offset error in annular subaperture stitching interferometry[J]. Acta Photonica Sinica, 45, 0912001(2016).
[21] Wen Y F, Cheng H B. Measurement of aspheric surfaces using annular subaperture stitching interferometry based on an automatic positioning method: theory and application[J]. Optical Engineering, 53, 074104(2014).
[22] Greivenkamp J E. Sub-nyquist interferometry[J]. Applied Optics, 26, 5245-5258(1987).
[23] Hou X, Wu F, Yang L et al. Layout model and analysis of annular subaperture stitching technique for testing large aspheric mirror[J]. Optics and Precision Engineering, 14, 207-212(2006).
Get Citation
Copy Citation Text
Yuan Su, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Kexin Ren, Yuwen Zhang. Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry[J]. Acta Optica Sinica, 2024, 44(8): 0826001
Category: Physical Optics
Received: Dec. 8, 2023
Accepted: Jan. 30, 2024
Published Online: Apr. 18, 2024
The Author Email: Tian Ailing (ailintian@xatu.edu.cn)